2021
DOI: 10.3390/coatings11121443
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Deuterium Retention and Release Behavior from Beryllium Co-Deposited Layers at Distinct Ar/D Ratio

Abstract: Beryllium-deuterium co-deposited layers were obtained using DC magnetron sputtering technique by varying the Ar/D2 gas mixture composition (10/1; 5/1; 2/1 and 1:1) at a constant deposition rate of 0.06 nm/s, 343 K substrate temperature and 2 Pa gas pressure. The surface morphology of the layers was analyzed using Scanning Electron Microscopy and the layer crystalline structure was analyzed by X-ray diffraction. Rutherford backscattering spectrometry was employed to determine the chemical composition of the lay… Show more

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Cited by 4 publications
(7 citation statements)
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“…This is emphasized by the morphology of the W33 sample (Figure 2d), where surface voids and defects are observed. These surface characteristics were also noticed for Be layers deposited on tungsten substrates in a previous work performed by the authors [41]. As it was underlined there the main cause can be the chemical and roughness difference between the Si and W substrates.…”
Section: Layer Morphologysupporting
confidence: 77%
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“…This is emphasized by the morphology of the W33 sample (Figure 2d), where surface voids and defects are observed. These surface characteristics were also noticed for Be layers deposited on tungsten substrates in a previous work performed by the authors [41]. As it was underlined there the main cause can be the chemical and roughness difference between the Si and W substrates.…”
Section: Layer Morphologysupporting
confidence: 77%
“…BeD 2 formation was only observed for the W33 sample and one can argue that the high Be concentration in this sample is the main reason. However, a crystalline phase corresponding to BeD 2 was not observed for the Be layers presented in this study or in previous studies where the layers were produced using the direct current magnetron sputtering technique [36,38,41]. Thus, the formation of these compounds here is not clearly understood.…”
Section: Crystalline Structurecontrasting
confidence: 69%
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