Development and application of highly charged ion source

e-J. Surf. Sci. Nanotechnol.

Zhang

et al. 2011

Self Cite

Highly oriented pyrolytic graphite (HOPG) samples were irradiated by highly charged ions Ar 11+ and Xe 26+. Scanning electron microscopy (SEM), electron spin resonance (ESR), a superconducting quantum interference device (SQUID), and Raman spectroscopy were used to investigate the effect of this irradiation. SEM observations revealed that the contrast between irradiated and unirradiated regions became discernible at a fluence of about 10 14 cm −2. On the other hand, for samples irradiated by Ar + ions, a fluence of the order of 10 15 cm −2 was necessary to obtain a similar contrast to that obtained by Ar 11+ ion irradiation. This demonstrates that highly charged ions effectively enhance modification of solid surfaces. Furthermore, the ESR and SQUID measurements revealed the formation of defects and magnetization of the irradiated surface. Raman measurements were also performed to investigate the structural transformation at different fluences.

Section: Methodsmentioning

confidence: 99%

Modification of HOPG Surface on Irradiation by Highly Charged Ar11+ and Xe26+ Ions Investigated by SEM, ESR, SQUID, and Raman Measurements

Liu

e-J. Surf. Sci. Nanotechnol.

Zhang

et al. 2011

Self Cite

“…We used a HCI source (electron beam ion source, EBIS) installed at Kobe University, Japan [8,9]. An EBIS consists of an electron gun, drift tubes, an electron collector and a super-conducting magnet.…”

Section: Methodsmentioning

confidence: 99%

Potential Effects in the Interaction of Highly Charged Ions with Solid Surfaces

e-J. Surf. Sci. Nanotechnol.

Sasaki

Miyamoto

et al. 2016

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In the field of nuclear fusion technology, Er2O3 thin film is a candidate for the coating material of the blanket of thermonuclear fusion reactor. It is known that the luminescence of Er2O3 provides information on its crystallinity. We observed luminescence of various samples including Er2O3 during the irradiation with highly charged ions produced by an electron beam ion source (EBIS) as a function of charge state and kinetic energy of incident Ar ions. We found that the luminescence intensity non-linearly rises as the charge state increases and is independent of kinetic energy. This demonstrates that the luminescence arises from the potential energy of highly charged ions rather than the kinetic energy. Emission spectra from various samples indicate that emission from sputtered atoms, mostly atomic hydrogen, is remarkable, while emission lines from the surface layers due to transitions among Stark splitting were observed for Er2O3 samples.

“…The design and performance of the EBIS is described elsewhere [9,10]. The electron beam (16keV, 80mA) was compressed in the drift tube of the EBIS by 3T magnetic field generated by a superconducting magnet cooled by a closed-cycle refrigerator.…”

Section: Methodsmentioning

confidence: 99%

SEM contrast of solid surfaces irradiated with highly charged ions

Trans. Mat. Res. Soc. Japan

Onishi

Asakura

et al. 2011

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We have observed secondary electron microscope (SEM) images of the surfaces of Si with native oxide layers and highly oriented pyrolytic graphite (HOPG) irradiated with highly charged ions (HCIs, Ar 11+ ) produced by an electron beam ion source at the fluence in the order of 10 13~1 0 14 /cm 2 . The contrast of SEM image changes brighter at irradiated areas for graphite surfaces, while the contrast for the Si surface become darken at irradiated areas. The SEM contrast between irradiated and unirradiated areas is understood in terms of the voltage contrast mechanism in the interpretation of SEM images.When the strength of the contrasts is roughly compared with the sample irradiated with singly charged ions (SCIs), HCI has 100 times higher efficiency for the production of SEM contrast than SCI. The high efficiency reflects the nature of interaction between HCI and surface.