This study demonstrated that a thin ZnO layer functions as a strong adhesion layer between Cu and glass, even when Cu films are formed near room temperature. The adhesion strength was studied with a scratch tester and the films and interfaces were characterized by scanning transmission electron microscopy. The origin of the high adhesion strength was discussed in terms of the presence of an extremely thin (approximately 10 nm) intermixing layer consisting of Cu, Pd, Zn, O, and Si.