2011
DOI: 10.1109/tase.2011.2157683
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Development and Force/Position Control of a New Hybrid Thermo-Piezoelectric MicroGripper Dedicated to Micromanipulation Tasks

Abstract: A new microgripper dedicated to micromanipulation and microassembly tasks is presented in this paper. Based on a new actuator, called thermo-piezoelectric actuator, the microgripper presents both a high range and a high positioning resolution. The principle of the microgripper is based on the combination of the thermal actuation (for the coarse positioning) and the piezoelectric actuation (for the fine positioning). In order to improve the performances of the microgripper, its actuators are modeled and a contr… Show more

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Cited by 130 publications
(94 citation statements)
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References 29 publications
(47 reference statements)
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“…They have been successfully used to develop stepper microrobots [1][2], Atomic Force Microscopes (AFM) [3] and continuous microactuators such as piezocantilevers and microgrippers [4] [5]. This recognition is mainly thanks to the high resolution (at the nanometre level), the high bandwidth (more than 1kHz) and the relatively high force density that they offer.…”
Section: Introductionmentioning
confidence: 99%
“…They have been successfully used to develop stepper microrobots [1][2], Atomic Force Microscopes (AFM) [3] and continuous microactuators such as piezocantilevers and microgrippers [4] [5]. This recognition is mainly thanks to the high resolution (at the nanometre level), the high bandwidth (more than 1kHz) and the relatively high force density that they offer.…”
Section: Introductionmentioning
confidence: 99%
“…Besides, the high response speed and sub-nanometer-scale resolution are also beneficial to implement precision manipulation [47,48]. However, PEA's capacity will be changed during the operation, which causes a severe hysteresis to its input voltage-output displacement relationship.…”
Section: Piezoelectric Actuatormentioning
confidence: 99%
“…Aiming to obtain a self-sensing scheme that estimates the transient and steadystate modes of the displacement, the author extended a previous static self-sensing scheme by adding a dynamic part. Again in 2011, Micky Rakotondrabe, developed a new micro-gripper dedicated to micromanipulation and micro-assembly tasks [23]. Based on a new actuator, called a thermo-piezoelectric actuator, the micro-gripper presented high-range and high-positioning resolution.…”
Section: Introductionmentioning
confidence: 99%