Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks

Serafino, Anthony J.; Coyle, Richard; Borutta, R.; Kestenbaum, A.; Wolk, Gary L.; Doll, R. F.

doi:10.1117/12.953135

Cited by 3 publications

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“…[12][13][14][15][16] The gas phase processes require an advanced gas-delivery system for the extremely toxic gases used. The first demonstrat(~d laser technique involves the UV photodissociation of gaseous metal alkyls,5 which occurs according to a purely photochemical mechanism.…”

Section: Introductionmentioning

confidence: 99%

Repair of transparent defects on photomasks by laser-induced metal deposition from an aqueous solution

Jacobs

1990

Journal of Vacuum Science &Amp; Technology B: Microelectronics Processing and Phenomena

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This paper describes a newly developed technique for repairing transparent defects on photomasks. After the uniform application of a thin transparent TiO2 film on the entire mask, a noble metal is photodeposited locally on the mask from an aqueous plating solution. The rate of photodeposition, and thereby, the structure and adherence of the deposited metal, depend on the preparation conditions of the TiO2 film, the composition of the plating solution and the incident light flux. These parameters can be selected in such a way that opaque metal metal pads can be deposited in sufficiently short illumination times (∼5 s). By means of laser projection through a variable rectangular aperture, it is possible to deposit rectangular metal pads with micron-sized dimensions and sharp edges and corners in a controlled and reproducible way. Since deposition is induced photochemically, thermal broadening of the deposit does not occur. It is shown that the repair process meets the requirements with respect to spot definition, photolithography, mask cleaning, and laser trimming.

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Section: Introductionmentioning

confidence: 99%

Repair of transparent defects on photomasks by laser-induced metal deposition from an aqueous solution

Jacobs

1990

Journal of Vacuum Science &Amp; Technology B: Microelectronics Processing and Phenomena

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“…1 Metalorganics are often highly sensitive to energetic beams of focused particles or light applied prior to pyrolysis. 26 Even the patterning process itselt is ot interest. Thus, unexposed areas may be developed away in the starting solvent.…”

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confidence: 99%

Metalorganic Deposition (MOD): A Nonvacuum, Spin-on, Liquid-Based, Thin Film Method

et al. 1989

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There are many methods of depositing thin film materials: thermal evaporation, sputtering, electron or laser beam evaporation, chemical vapor deposition (CVD), and molecular beam epitaxy (MBE). A good survey of many of the deposition methods appears in the 1988 November and December issues of the MRS BULLETIN. One method not included in that survey, however, is metalorganic deposition (MOD), a powerful method for depositing a variety of materials.Metalorganic deposition is not to be confused with metalorganic chemical vapor deposition (MOCVD), which is a gaseous deposition method. MOD is a nonvacuum, liquid-based, spin-on method of depositing thin films. A suitable organic precursor, dissolved in solution, is dispensed onto a substrate much like photoresist. The substrate is spun at a few thousand revolutions per minute, removing the excess fluid, driving off the solvent, and uniformly coating the substrate surface with an organic film a few microns thick. The soft metalorganic film is then pyrolyzed in air, oxygen, nitrogen, or other suitable atmosphere to convert the metalorganic precursors to their constituent elements, oxides, or other compounds. Figure 1 shows a schematic of the deposition process including a prebake and annealing (if necessary).

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Laser system design for safety in manufacturing

Kestenbaum¹,

Coyle²

1990

International Laser Safety Conference

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Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks

Cited by 3 publications

References 0 publications

Repair of transparent defects on photomasks by laser-induced metal deposition from an aqueous solution

Repair of transparent defects on photomasks by laser-induced metal deposition from an aqueous solution

Metalorganic Deposition (MOD): A Nonvacuum, Spin-on, Liquid-Based, Thin Film Method

Laser system design for safety in manufacturing

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