2009
DOI: 10.1063/1.3176469
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Development and performance analysis of a standard orifice flow calibration system

Abstract: An orifice flow system has been developed indigenously which is a primary standard for the calibration of high vacuum gauges in the range of 10(-3)-10(-6) mbar. It consists of a constant-volume flow meter, designed to generate a known flow rate of a particular gas to the vacuum chamber. This chamber is partitioned into two parts by a plate with an orifice of calculable conductance. The pressures, generated by this standard system, are compared with those of secondary standard, namely, spinning rotor gauge. Dif… Show more

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Cited by 7 publications
(5 citation statements)
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“… Invalidation of the Boyle's law (it remains valid when (a) the molar quantity of gas transferred through the system is maintained constant, (b) the process of pressure generation develops under isothermal conditions, and (c) the gas used for pressure generation obeys the ideal gas laws) and  The systematic errors in the measurement of the diŠerent quantities involved in the evaluation of the pressure generated in the calibration chamber 35) .…”
Section: Static Expansion Systemsmentioning
confidence: 99%
See 1 more Smart Citation
“… Invalidation of the Boyle's law (it remains valid when (a) the molar quantity of gas transferred through the system is maintained constant, (b) the process of pressure generation develops under isothermal conditions, and (c) the gas used for pressure generation obeys the ideal gas laws) and  The systematic errors in the measurement of the diŠerent quantities involved in the evaluation of the pressure generated in the calibration chamber 35) .…”
Section: Static Expansion Systemsmentioning
confidence: 99%
“…In the high and ultrahigh vacuum ranges, the dynamic expansion method, also known as the``oriˆce ‰ow method'' 35) and the``continuous expansion method'', is widely used for the calibration of vacuum gauges. Since at low pressures, about 10 -6 Pa, the generated pressure is aŠected by the outgassing of vacuum vessels and the adsorption of gas molecules on the inner surfaces of the vessels, the most suitable method is the dynamic expansion method 37) .…”
Section: Dynamic Expansion Systemsmentioning
confidence: 99%
“…It is used for consistent vacuum measurements as well as reliable secondary standard because it is an internationally recognized reliable transfer standard from 10 -2 mbar to 10 -6 mbar [11]. This gauge operates by virtue of the viscous or frictional forces that gas molecules exert on the moving surface which is a small stainless steel ball.…”
Section: High Vacuum Gaugesmentioning
confidence: 99%
“…Another important gauge, which is also used for high vacuum work is Spinning Rotor Gauge (SRG). It is used for consistent vacuum measurements as well as reliable secondary standard because it is an internationally recognized reliable transfer standard from 10 -2 mbar to 10 -6 mbar [11]. This gauge operates by virtue of the viscous or frictional forces that gas molecules exert on the moving surface which is a small stainless steel ball.…”
Section: High Vacuum Gaugesmentioning
confidence: 99%