Development and performance characterization of a new standard mercury manometer

Abstract

A new standard mercury manometer has been developed to calibrate low vacuum gauges in the range from atmospheric pressure to 1 mbar. It consists of a cistern that is a small stainless steel container used as mercury reservoir and also as the first Hg column connected to a long glass tube used as the second Hg column. Manometer scale covers the difference in Hg heights in two columns up to the length equivalent to 1000 mbars. This is a novel low cost manometer with simple design, compact fabrication, better accuracy, easy operation, low vibration, and thermal stability. In order to evaluate the performance of the equipment, its generated pressures are compared with those of secondary standard, i.e., calibrated capacitance diaphragm gauge, giving the average correction factor 0.998. Different uncertainties of the generated pressures are discussed in detail along with the evaluation of correction factors. The relative uncertainty in the higher pressure side is found to be in the range of 10(-4) which is within the limit (approximately 10(-4)).

Untitled

“…Capacitance Diaphragm Gauge is used in clean vacuum systems because of its ease of use, potential accuracy, fine resolution and quick response [6]. It is used as a transfer gauge because its accuracy, reliability and stability have long been proved to be high in international comparison of vacuum gauges [7]. In this gauge a thin diaphragm (membrane) is used as a sensing element.…”

Selection of Appropriate Equipment for Designing Effective Vacuum System

“…It is used as a transfer gauge because its accuracy, reliability and stability have long been proved to be high in international comparison of vacuum gauges [7]. In this gauge a thin diaphragm (membrane) is used as a sensing element.…”