IOP Conf. Ser.: Mater. Sci. Eng.
 2020
DOI: 10.1088/1757-899x/781/1/012002
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Development and researches of vacuum gauges with sensitive elements created by MEMS technology

R. E. Kuvandykov
1
,
R. A. Teteruk
2

Abstract: The article is devoted to the development and research of sensitive elements, transducers and vacuum gauges created by MEMS technology and intended for measuring absolute pressure in a wide range from 10−3 to 105 Pa.

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