2014
DOI: 10.1299/transjsme.2014dsm0214
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Development and speed control of water driven stage

Abstract: Water driven stage is developed as a linear stage of the ultra-precision machine tool, especially, that is intentionally designed for the machining of small parts in size, such as optical mirrors and lenses. The water driven stage is mainly composed of a body of the stage and a table. The table is supported by water hydrostatic bearings and is driven by water hydraulic cylinder. Speed of the stage, determining the feed rate of the diamond turning, can be controlled by the flow rate into the water hydraulic cyl… Show more

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Cited by 2 publications
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