Development of a 20-MHz wide-bandwidth PMN-PT single crystal phased-array ultrasound transducer

Wong, Chi Man; Chen, Yan; Luo, Haosu; Dai, Jiyan; Lam, Kwok Ho; Chan, Helen Lai Wa

doi:10.1016/j.ultras.2016.09.012

Cited by 46 publications

(19 citation statements)

References 33 publications

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“…where is the center frequency, VT and VR are the transmitting and receiving amplitudes, and is the distance between the target and transducer. The IL value of the phased array elements was measured to be −19.7 dB, which is superior to those of PMN-PT single crystal-and PZT-5H-based high frequency (≥20 MHz) phased arrays [18,19,20]. This phenomenon is probably related to the high Curie Temperature of PIN-PMN-PT single crystal.…”

Section: Characterization and Discussionmentioning

confidence: 86%

“…Currently, to the best of our knowledge, single element transducers and linear arrays are widely used [14,15,16,17]. Only a few studies have been carried on the high-frequency ultrasound phased array [18,19,20,21], though it is very useful in biomedical imaging by providing electronic-beam-focusing and steering capabilities. Furthermore, there are even fewer researches on composite-material-based high-frequency ultrasound phased arrays, despite the numerous benefits of composite piezoelectric materials (lower acoustic impedance, higher electromechanical coefficient, broader bandwidth, etc.).…”

Section: Introductionmentioning

confidence: 99%

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PIN-PMN-PT Single Crystal 1-3 Composite based 20 MHz Ultrasound Phased Array

Zhang¹,

Wu²,

Ouyang³

et al. 2019

Preprint

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Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12μm and pitch of 50μm was prepared. The as-made piezoelectric composite material behaved high piezoelectric constant (d33=1500 pC/N), high electromechanical coefficient (kt=0.81) and low acoustic impedance (16.2 Mrayls). Using lithography and flexible circuit method, a 48-element phased array was successfully fabricated from such piezoelectric composite. The array element was measured to have a central frequency of 20MHz and a fractional bandwidth of approximately 77% at -6dB. Of particular significance was that this PIN-PMN-PT single crystal 1-3 composite based phased array exhibits a superior insertion loss compared with PMN-PT single crystal and PZT-5H based 20 MHz phased arrays. The focusing and steering capabilities of such phased array were validated through Field II simulations. These promising results suggest that the PIN-PMN-PT single crystal 1-3 composite based high frequency phased array is a good candidate for ultrasound imaging applications.

show abstract

Section: Characterization and Discussionmentioning

confidence: 86%

Section: Introductionmentioning

confidence: 99%

PIN-PMN-PT Single Crystal 1-3 Composite based 20 MHz Ultrasound Phased Array

Zhang¹,

Wu²,

Ouyang³

et al. 2019

Preprint

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show abstract

“…In this mode of operation, the center frequency of an ultrasound transducer is directly determined by the thickness of the piezoelectric element, with the fundamental resonance frequency occurring when the thickness is equal to half the wavelength of the acoustic wave in the piezoelectric material [ 33 ]. However, conventional ultrasound transducers are difficult and expensive to be fabricated into arrays for high-frequency and 3D volumetric imaging applications, which require very small kerfs (the separation trench between two adjacent elements) to reduce crosstalks and avoid grating lobes as high-frequency arrays have small pitches [ 34 , 35 ]. Very thin ceramic sheets are also required to achieve high frequencies.…”

Section: Introductionmentioning

confidence: 99%

MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications

Wang

Yang

et al. 2020

Micromachines

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Photoacoustic imaging (PAI) is drawing extensive attention and gaining rapid development as an emerging biomedical imaging technology because of its high spatial resolution, large imaging depth, and rich optical contrast. PAI has great potential applications in endoscopy, but the progress of endoscopic PAI was hindered by the challenges of manufacturing and assembling miniature imaging components. Over the last decade, microelectromechanical systems (MEMS) technology has greatly facilitated the development of photoacoustic endoscopes and extended the realm of applicability of the PAI. As the key component of photoacoustic endoscopes, micromachined ultrasound transducers (MUTs), including piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs), have been developed and explored for endoscopic PAI applications. In this article, the recent progress of pMUTs (thickness extension mode and flexural vibration mode) and cMUTs are reviewed and discussed with their applications in endoscopic PAI. Current PAI endoscopes based on pMUTs and cMUTs are also introduced and compared. Finally, the remaining challenges and future directions of MEMS ultrasound transducers for endoscopic PAI applications are given.

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“…As an example of using an electrical tuning method, Rodriguez et al designed a low cost L-C matching network to eliminate the energy loss caused by the electrical impedance mismatch between the ultrasonic device and the driving equipment, improving the signal sensitivity of the ultrasonic device [7]. In terms of improving the array performance by considering the active piezoelectric material, Wong et al proposed a high-frequency phased array transducer design with a PMN-PT single crystal material, which exhibited a higher operational bandwidth compared with other piezoceramic designs [8]. Moreover, enhanced array performance can be achieved through modification of the active layer structure.…”

Section: Introductionmentioning

confidence: 99%

Linear ultrasonic array incorporating a Cantor Set fractal element configuration

Fang

Qiu

Mulholland

et al. 2017

2017 IEEE International Ultrasonics Symposium (IUS)

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Abstract-The resonance frequency of an active element in a piezoelectric ultrasonic transducer is dependent on its length scale. Inspired by natural occurring auditory systems, incorporation of elements with varying length scales in the piezoelectric transducer design can result in a wider operational bandwidth. In this paper, a mathematical algorithm was developed first to define the feature of a fractal geometry called the Cantor Set (CS), then a series of parameter sweep simulations are performed to design a CS fractal array transducer and a conventional array transducer and optimize their performance. The behaviors of these two array transducers were explored theoretically, using finite element modeling and experimentally using the scanning laser vibrometry. The FE simulation results and experimental results correlate well with each other, which indicates an approximate 30% operating bandwidth enhancement and a 5 dB side lobe reduction can be achieved by the CS fractal array compared to the conventional linear array design.

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Development of a 20-MHz wide-bandwidth PMN-PT single crystal phased-array ultrasound transducer

Cited by 46 publications

References 33 publications

PIN-PMN-PT Single Crystal 1-3 Composite based 20 MHz Ultrasound Phased Array

PIN-PMN-PT Single Crystal 1-3 Composite based 20 MHz Ultrasound Phased Array

MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications

Linear ultrasonic array incorporating a Cantor Set fractal element configuration

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