Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications

Shi, Zhichao; Bélier, B.; Martincic, Émile; Petit, Lionel; Moulin, Johan; Lefeuvre, Élie; Terrien, J.; Prelle, Christine; Lamarque, Frédéric

doi:10.1007/s00542-017-3320-1

Cited by 5 publications

(1 citation statement)

References 13 publications

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“…The second architecture of micro-positioning devices is based on an array of shortrange actuators. The actuators of such an array can be based on a digital principle [11]. This kind of actuator is open-loop-controlled and does not require any feedback sensor to measure the actuator displacement.…”

Section: Introductionmentioning

confidence: 99%

Planar Micro-Positioning Device Based on a 3D Digital Electromagnetic Actuator

et al. 2021

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In this paper, a novel micro-positioning device based on a 3D digital actuator is presented. The proposed system allows realizing planar motions of micro-objects, which could be implemented in several applications where micro-positioning tasks are needed such as micro-component manufacturing/assembly, biomedicine, scanning microscopy, etc. The device has three degrees of freedom, and it is able to achieve planar motions of a mobile plate in the xy-plane at two different levels along the z-axis. It consists of a hexagonal mobile part composed of a permanent magnet that can reach twelve discrete positions distributed between two z-axis levels (six at each level). Two different approaches are presented to perform positioning tasks of the plate using the digital actuator: the stick-slip and the lift-mode approaches. A comparison between these two approaches is provided on the basis of the plate displacement with respect to different current values and conveyed mass. It was observed that for a current of 2 A, the actuator is able to displace a mass of 1.15 g over a distance of 0.08 mm. The optimal positioning range of the planar device was found to be ±5.40 mm and ±7.05 mm along the x- and y-axis, respectively.

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Section: Introductionmentioning

confidence: 99%