Development of a Chemical Sensor Device for Monitoring Hazardous Gases Generated in the Semiconductor Manufacturing Process

Abstract

The semiconductor industry plays a crucial role in various fields but also contributes to environmental degradation. Throughout the semiconductor chip manufacturing process, hazardous gases are released at each stage, despite stringent treatment procedures. These gases can be categorized into four groups: acidic and alkaline gases, volatile organic compounds, flammable and corrosive gases, and greenhouse gases. To meet stricter emission standards, further advancements in gas sensor technology are essential. This review examines recent research on monitoring these gases, highlighting the capabilities and limitations of existing sensor technologies. Additionally, the paper discusses current challenges in gas sensing research and proposes future directions for improving technologies.