Development of a design for an ionisation vacuum gauge suitable as a reference standard

Ein neues hochgenaues und zuverlässiges Ionisationsvakuummeter

“…Anders als bei herkömmlichen Vakuummetern mit undefinierten Elektronenbahnen werden in dem neu entwickelten Ionisationsvakuummeter [3], [4]…”

Electrons on a straight path: A novel ionisation vacuum gauge suitable as reference standard

“…For this reason, for the purpose of a more stable ionisation gauge, we developed a design [5] based on ideas of Bills et al [6] and Klopfer [7]. These designs offer both the possibility of a well-defined electron path and the possibility to separate at least some of the surface effects from volume effects.…”

“…All gauges tested showed a linearity well within ± 0.5 % (Table 2). We also checked if there is a depletion of molecules within the electron beam [5]. This would be revealed by a non-linearity of ion current versus electron current.…”

Efficient Combination of Surface Texturing and Functional Coating for Very Low Secondary Electron Yield Surfaces and Rough Nonevaporable Getter Films

“…However, for other solutions it could be beneficial to reduce the SEY even further in order to suppress reflected, backscattered, and secondary electrons that could potentially generate background noise or deteriorate the measured signal, as for example in electron collectors, for the measurement of low electron currents in ultra‐high vacuum (UHV) or for ionization based pressure gauges. [ 18,19 ]…”

“…However, for other solutions it could be beneficial to reduce the SEY even further in order to suppress reflected, backscattered, and secondary electrons that could potentially generate background noise or deteriorate the measured signal, as for example in electron collectors, for the measurement of low electron currents in ultra-high vacuum (UHV) or for ionization based pressure gauges. [18,19] The material parameters that influence the electron yield are numerous. Since the emitted electrons are generated in a depth of a few nanometers, it is determined by the properties of the near-surface region of the material, such as the degree of oxidation of a metal, [20] the existence of adsorbates or surface impurities, or in general the surface chemical composition.…”