2009
DOI: 10.1088/0960-1317/19/10/105019
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Development of a flexible microfluidic system integrating magnetic micro-actuators for trapping biological species

Abstract: A flexible microfluidic system embedding microelectromagnets has been designed, modeled and fabricated by using a photosensitive resin as structural material. The fabrication process involves the integration of micro-coils in a multilayer SU-8 microfluidic system by combining standard electroplating and dry films lamination. This technique offers numerous advantages in terms of integration, biocompatibility and chemical resistance. Various designs of micro-coils, including spiral, square or serpentine wires, h… Show more

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Cited by 33 publications
(16 citation statements)
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“…To expand the functionality of polymeric materials, composites of polymer and magnetic nanoparticles (MNs) have been studied intensely over several decades. Particularly, magnetic property has gained much interest because it can be used in many different magnetically transparent environments, including air, vacuum, water, electrolyte, and even solid substrates [28], [29]. In addition, magnetic materials can be remotely controlled without any physical connections [30].…”
Section: Magnetic Nanocompositementioning
confidence: 99%
“…To expand the functionality of polymeric materials, composites of polymer and magnetic nanoparticles (MNs) have been studied intensely over several decades. Particularly, magnetic property has gained much interest because it can be used in many different magnetically transparent environments, including air, vacuum, water, electrolyte, and even solid substrates [28], [29]. In addition, magnetic materials can be remotely controlled without any physical connections [30].…”
Section: Magnetic Nanocompositementioning
confidence: 99%
“…The alignment between the different layers are obtained classically thank to gold alignment marks fabricated during the first steps. This process steps are described in detail in Fulcrand et al (2009);Abgrall et al (2006).…”
Section: Microfluidic Channelmentioning
confidence: 99%
“…Tantalum was used as an adhesion layer and platinum was used to avoid electrochemical reactions. Fluidic channels were made using a 25-mm thick SU8 (SU8 2025, Microchem) layer and sealed by laminating a 10 mm SU8 dry film [18,19]. The latter was patterned by conventional lithography to form electric and fluidic vias.…”
Section: Chip Design and Packagingmentioning
confidence: 99%