Development of a gas detection micro-device for hydrogen fluoride vapours

Sanchez, Jean-Baptiste; Berger, Franck; Daniau, W.; Blind, P.; Fromm, M.; Nadal, Marie-Hélène

doi:10.1016/j.snb.2005.11.025

Cited by 19 publications

(8 citation statements)

References 11 publications

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“…Moreover, with the development of machining and manufacturing technology, the miniaturization has become a continuing trend in producing various devices. Therefore, the micro/ nano machining of the semiconductors has attracted significant attentions [1][2][3][4][5][6][7][8]. Femtosecond laser as an effective tool has fabricated many micro/nano structures on semiconductors for applying in mechanical, optical, and electronic products [1,6,[8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

The ripples and nanoparticles on silicon irradiated by femtosecond laser

Han

2010

Chemical Physics Letters

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Section: Introductionmentioning

confidence: 99%

The ripples and nanoparticles on silicon irradiated by femtosecond laser

Han

2010

Chemical Physics Letters

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Section: Figurementioning

confidence: 99%

Advancements in Microfabricated Gas Sensors and Microanalytical Tools for the Sensitive and Selective Detection of Odors

Ollé

Farré-Lladós

Casals‐Terré

2020

Sensors

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In recent years, advancements in micromachining techniques and nanomaterials have enabled the fabrication of highly sensitive devices for the detection of odorous species. Recent efforts done in the miniaturization of gas sensors have contributed to obtain increasingly compact and portable devices. Besides, the implementation of new nanomaterials in the active layer of these devices is helping to optimize their performance and increase their sensitivity close to humans’ olfactory system. Nonetheless, a common concern of general-purpose gas sensors is their lack of selectivity towards multiple analytes. In recent years, advancements in microfabrication techniques and microfluidics have contributed to create new microanalytical tools, which represent a very good alternative to conventional analytical devices and sensor-array systems for the selective detection of odors. Hence, this paper presents a general overview of the recent advancements in microfabricated gas sensors and microanalytical devices for the sensitive and selective detection of volatile organic compounds (VOCs). The working principle of these devices, design requirements, implementation techniques, and the key parameters to optimize their performance are evaluated in this paper. The authors of this work intend to show the potential of combining both solutions in the creation of highly compact, low-cost, and easy-to-deploy platforms for odor monitoring.

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“…The first microchannels were fabricated in circular spiral 3 , square spiral 80 and rectangular spiral 81 geometries. In 2006, Sanchez, et al designed the radiator geometry 82 and Stadermann et al fabricated channels in the serpentine geometry. 83 The need for comparing the separation performance of different configurations of microcolumns was not clear until the study of Radadia and co-workers performed on the effect of microcolumn geometry on the performance of chip-based GC.…”

Section: Geometry Of Channelsmentioning

confidence: 99%

“…Early applications of such chip-based GC systems were only reported in analyses of hydrocarbons 3 and gas samples. 80 However, as shown in Table 2, the development of these systems has been extended across a wide variety of application areas such as health service, 45,51,57,81,111,134,139,140 industry pollution monitoring, 56,57,111 environmental analysis, 32,54,56,57,82,88,111,134,141 homeland security, 50,142,143 petrochemical industries, 143 and as the second dimension of comprehensive two-dimensional gas chromatography (GC × GC). 80,97,98,111,137 Nowadays chipbased gas chromatograph instruments are commercially available from companies such as Dolomite, 144 C2V 145 , etc.…”

Section: Applicationsmentioning

confidence: 99%

Through the years with on-a-chip gas chromatography: a review

2015

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In recent years, the need for measurement and detection of samples in situ or with very small volume and low concentration (low and sub-parts per billion) is a cause for miniaturizing systems via microelectromechanical system (MEMS) technology. Gas chromatography (GC) is a common technique that is widely used for separating and measuring semi-volatile and volatile compounds. Conventional GCs are bulky and cannot be used for in situ analysis, hence in the past decades many studies have been reported with the aim of designing and developing chip-based GC. The focus of this review is to follow and investigate the development and the achievements in the field of chip-based GC and its components from the beginning up to the present.

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Development of a gas detection micro-device for hydrogen fluoride vapours

Cited by 19 publications

References 11 publications

The ripples and nanoparticles on silicon irradiated by femtosecond laser

The ripples and nanoparticles on silicon irradiated by femtosecond laser

Advancements in Microfabricated Gas Sensors and Microanalytical Tools for the Sensitive and Selective Detection of Odors

Through the years with on-a-chip gas chromatography: a review

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