Development of a high-efficiency high-resolution particle-induced x-ray emission system for chemical state analysis of environmental samples

Hasegawa, Jun; Tada, Tsukasa; Oguri, Y.; Hayashi, M; Toriyama, T.; Kawabata, Tetsuya; Masai, K.

doi:10.1063/1.2756623

Cited by 26 publications

(7 citation statements)

References 21 publications

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“…This valence information is regularly used in EPMA, the electron spectroscopies (XPS, AES), and the absorption spectroscopies (EELS, XAS). It can also be used in PIXE if a high resolution detector is used, which could be WDX [133] [134], or one of the new high resolution calorimetric EDS detectors [135]. Of course, high resolution also allows disentangling of overlapping peaks which often occurs, especially for the L lines, and is one main cause of the degradation of sensitivity [136].…”

Section: Particle-induced X-ray Emissionmentioning

confidence: 99%

Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation

Jeynes

Webb

Lohstroh

2011

Rev. Accl. Sci. Tech.

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Analysis using MeV ion beams is a thin film characterisation technique invented some 50 years ago which has recently had the benefit of a number of important advances. This review will cover damage profiling in crystals including studies of defects in semiconductors, surface studies, and depth profiling with sputtering. But it will concentrate on thin film depth profiling using Rutherford backscattering, particle induced X-ray emission and related techniques in the deliberately synergistic way that has only recently become possible. In this review of these new developments, we will show how this integrated approach, which we might call “total IBA”, has given the technique great analytical power

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Section: Particle-induced X-ray Emissionmentioning

confidence: 99%

Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation

Jeynes

Webb

Lohstroh

2011

Rev. Accl. Sci. Tech.

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“…Typically, these kinds of shifts can be resolved only with a wavelength-dispersive and not with an energy-dispersive detector; see, for example, Ref. [30]. With TES detectors in the electron-probe analysis setup, evidence for Fe L-shell transition chemical shifts has been seen before [17].…”

Section: Chemical Shifts Intensity Ratios and Satellite Peaks Inmentioning

confidence: 99%

Broadband Ultrahigh-Resolution Spectroscopy of Particle-Induced X Rays: Extending the Limits of Nondestructive Analysis

et al. 2016

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Nondestructive analysis (NDA) based on x-ray emission is widely used, for example, in the semiconductor and concrete industries. Here, we demonstrate significant quantitative and qualitative improvements in broadband x-ray NDA by combining particle-induced emission with detection based on superconducting microcalorimeter arrays. We show that the technique offers great promise in the elemental analysis of thin-film and bulk samples, especially in the difficult cases where tens of different elements with nearly overlapping emission lines have to be identified down to trace concentrations. We demonstrate the efficiency and resolving capabilities by spectroscopy of several complex multielement samples in the energy range 1-10 keV, some of which have a trace amount of impurities not detectable with standard silicon drift detectors. The ability to distinguish the chemical environment of an element is also demonstrated by measuring the intensity differences and chemical shifts of the characteristics x-ray peaks of titanium compounds. In particular, we report measurements of the Kα=Kβ intensity ratio of thin films of TiN and measurements of Ti Kα satellite peak intensities in various Ti thin-film compounds. We also assess the detection limits of the technique, comment on detection limits possible in the future, and discuss possible applications.

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“…Absorption involving 1s level and emission from 2p, 3s, 3p and 3d initial levels are discussed. A method that is not strictly X-ray spectroscopy is particle-induced X-ray Emission (PIXE) [41]. In this method, neutrons or other particles such as electrons are used to induce X-ray fluorescence [42].…”

Section: Other X-ray Methodsmentioning

confidence: 99%

More power to X‐rays: New developments in X‐ray spectroscopy

Guo¹

2009

Laser & Photonics Reviews

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Recent developments in X-ray spectroscopy in the last decade are reviewed. A specific emphasis is placed on displaying the strong natural connection between X-ray spectroscopy and materials science. Brief explanations of several X-ray spectroscopic methods are given. X-ray spectroscopic instruments such as table-top X-ray sources are discussed in detail, whereas those employing synchrotron and other sources are briefly addressed. The spectroscopic methods and results from materials investigations are reviewed according to their positions in a 3D parameter space of time, length, and energy. New experimental measurements on atoms, molecules, nanomaterials, and bulk materials that include insulators, semiconductors, metals and magnetic materials using both static and time-resolved methods are reviewed.A typical table-top experimental setup to probe a sample using an optical pump (green color beam) -X-ray probe (purple color beam) technique. The X-ray pulses are produced by femtosecond optical pulses. Two exemplary data are displayed: One is direct imaging of plasmas generated from laser evaporation of a solid target (Imaging data) and the other is an X-ray absorption spectrum of a nickel sample (USEXAS data).

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Development of a high-efficiency high-resolution particle-induced x-ray emission system for chemical state analysis of environmental samples

Cited by 26 publications

References 21 publications

Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation

Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation

Broadband Ultrahigh-Resolution Spectroscopy of Particle-Induced X Rays: Extending the Limits of Nondestructive Analysis

More power to X‐rays: New developments in X‐ray spectroscopy

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