Development of a high-performance gantry system for a new generation of optical slope measuring profilers

Assoufid, Lahsen; Brown, Nathan; Crews, D. J.; Sullivan, Joseph; Erdmann, M.; Qian, Jun; Jemian, Pete R.; Yashchuk, Valeriy V.; Takacs, Peter Z.; Artemiev, Nikolay A.; Merthe, Daniel J.; McKinney, Wayne R.; Siewert, Frank; Zeschke, Thomas

doi:10.1016/j.nima.2012.11.063

Cited by 41 publications

(27 citation statements)

References 23 publications

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“…Autocollimatorbased slope measuring profilers [7][8][9][10][11][12][13] as well as upgraded LTP's [14][15][16][17] provide sub 100 nrad root mean square (rms) accuracy for measuring long flat and slightly curved optical components. 18,19 Dedicated mapping techniques enable complete characterizing of optical components' 3D topography.…”

Section: Introductionmentioning

confidence: 99%

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Siewert

Zeschke

Arnold

et al. 2016

Review of Scientific Instruments

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Slope measuring deflectometry is commonly used by the X-ray optics community to measure the long-spatial-wavelength surface figure error of optical components dedicated to guide and focus X-rays under grazing incidence condition at synchrotron and free electron laser beamlines. The best performing instruments of this kind are capable of absolute accuracy on the level of 30-50 nrad. However, the exact bandwidth of the measurements, determined at the higher spatial frequencies by the instrument’s spatial resolution, or more generally by the instrument’s modulation transfer function (MTF) is hard to determine. An MTF calibration method based on application of a test surface with a one-dimensional (1D) chirped height profile of constant amplitude was suggested in the past. In this work, we propose a new approach to designing the test surfaces with a 2D-chirped topography, specially optimized for MTF characterization of slope measuring instruments. The design of the developed MTF test samples based on the proposed linear chirped slope profiles (LCSPs) is free of the major drawback of the 1D chirped height profiles, where in the slope domain, the amplitude strongly increases with the local spatial frequency of the profile. We provide the details of fabrication of the LCSP samples. The results of first application of the developed test samples to measure the spatial resolution of the BESSY-NOM at different experimental arrangements are also presented and discussed.

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Section: Introductionmentioning

confidence: 99%

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Siewert

Zeschke

Arnold

et al. 2016

Review of Scientific Instruments

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“…63,64 The key point for improvement is reduction of the instability and systematic error, inherent to the instrument. We address these problems in a new profiler under development.…”

Section: Discussionmentioning

confidence: 99%

Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

et al. 2015

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Abstract. The advent of fully coherent free-electron laser and diffraction-limited synchrotron radiation storage ring sources of x-rays is catalyzing the development of new ultrahigh accuracy metrology methods. To fully exploit these sources, metrology needs to be capable of determining the figure of an optical element with subnanometer height accuracy. The major limiting factors of the current absolute accuracy of ex situ metrology are drift errors due to temporal instabilities of the lab's environmental conditions and systematic errors inherent to the metrology instruments. Here, we discuss in detail work at the Advanced Light Source X-Ray Optics Laboratory on building of advanced environmental control that is a key component in the development of ultrahigh accuracy ex situ metrology for x-ray optics. By a few examples, we show how the improvement of the environmental conditions in the lab allows us to significantly gain efficiency in performing ex situ metrology with high-quality x-ray mirrors. The developed concepts and approaches, included in the design of the new X-Ray Optics Laboratory, are described in detail. These data are essential for construction and successful operation of a modern metrology facility for x-ray optics, as well as high-precision measurements in many fields of experimental physics. © The Authors. Published by SPIE under a Creative CommonsAttribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requiresfull attribution of the original publication, including its DOI.

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“…Enabling an accuracy of 0.05 µrad rms for plane and slightly curved optics the BESSY-NOM represents a 2nd generation slope measuring profiler [26,27,28,37]. Further NOM or NOM-like instruments have been commissioned recently at Diamond Light Source (UK) [38], ALBA Synchrotron (Spain) [39], APS-Advanced Photon Source (USA) [40,41], NSLS-II (USA) [42] and at the LBNL / ALS -Optics and Metrology Lab in Berkeley (USA) [43]. These highly accurate instrumentation are essential for a detailed characterization of upcoming high performance reflective optical elements like extreme long super-plane mirrors for FEL application [44], diffraction limited focusing optics [45] or super-polished substrates for multilayer-monochromators [46,47].…”

Section: Slope Measuring Instruments In Use For the Inspection Of Synmentioning

confidence: 99%

Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics

2014

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The requirements on the quality of ultra-precise X-ray optical components for application in the Synchrotron Radiation (SR) community are increasing continually and strongly depend on the quality of the metrology devices available to measure such optics. To meet the upcoming accuracy goal of 50 nrad rms for slope measuring profilers, a dedicated project, SIB58 Angles, consisting of 16 worldwide partners and supported by the European Metrology Research Programme (EMRP) was started in Sep 2013. The project covers investigations on autocollimators under extremely challenging measuring conditions, ray-tracing models, 2D autocollimator calibration (for the first time worldwide), determination of error sources in angle encoders providing traceability by 'sub-division of 2π rad' with nrad uncertainty, angle generation by 'ratio of two lengths' in nrad level, and on the development of portable precise Small Angle Generators (SAGs) for regular in-situ checks of autocollimators' performance. Highlights from the project will be reported in the paper and the community of metrology for X-Ray and EUV Optics will be informed about its progress and the latest work in angle metrology.

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Development of a high-performance gantry system for a new generation of optical slope measuring profilers

Cited by 41 publications

References 23 publications

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics

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