Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

Abstract

Abstract:To measure various components with nano-scale precision, a new high-precision touch-trigger probe using a single low-cost sensor for a micro-coordinate measuring machine (CMM) is presented in this paper. The sensor is composed of a laser diode, a plane mirror, a focusing lens, and a quadrant photo detector (QPD). The laser beam from the laser diode with an incident angle is reflected by the plane mirror and then projected onto the quadrant photo detector (QPD) via the focusing lens. The plane mirror is adhered to the upper surface of the floating plate supported by an elastic mechanism, which can transfer the displacement of the stylus's ball tip in 3D to the plane mirror's vertical and tilt movement. Both motions of the plane mirror can be detected by respective QPDs. The probe mechanism was analyzed, and its structural parameters that conform to the principle of uniform sensitivity and uniform stiffness were obtained. The simulation result showed that the stiffness was equal in 3D and less than 1 mN/µm. Some experiments were performed to investigate the probe's characteristics. It was found that the probe could detect the trigger point with uniform sensitivity, a resolution of less than 5 nm, and a repeatability of less than 4 nm. It can be used as a touch-trigger probe on a micro/nano-CMM.

Evaluation and Optimization of Task-oriented Measurement Uncertainty for Coordinate Measuring Machines Based on Geometrical Product Specifications

“…(2) Uncertainty caused by the instrumental errors This refers to the uncertainty component produced by the deviation of the CMM's own metering characteristics from the ideal characteristics, including the uncertainty caused by design, standard quantity, detection system, dynamic characteristics, fitting and evaluation algorithm, and other factors, mainly including the impacts of 21 items of CMM mechanism errors and probe system errors, etc. on the measurement results [30]. Usually, CMM can correct 21 items of mechanism errors and calibrate the probe system.…”

Fabrication and Study of Micro Monolithic Tungsten Ball Tips for Micro/Nano-CMM Probes

“…An experimental setup shown in Figure 7 was constructed to verify the practicability of the fabricated micro ball tips. A micro-monolithic tungsten tip glued to a needle tube was installed on a homemade contact probe [ 15 ]. The probe was installed on a discarded angle instrument’s stand frame, which is made up of cast iron and exhibits a weight of more than 20 kg, to improve stability.…”

Precision Manufacturing of Patterned Beryllium Bronze Leaf Springs via Chemical Etching

“…The leaf spring is often used as a key component of high-precision measuring instruments, or micro-actuators, when an elastic and recoverable micromotion is required, such as the cantilever beam used in atomic force microscopy (AFM). Claverley et al (2010) and Li et al (2014 developed several probing systems for micro/nano CMMs [3][4][5].…”