Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Li, Ruijun; Lei, Ying-Jun; Chang, Zhen-Xin; Zhang, Liansheng; Fan, Kuang‐Chao

doi:10.3390/s18092910

Cited by 29 publications

(9 citation statements)

References 30 publications

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“…According to the authors, the device was able to perform in low frequency and showed high sensitivity, and showed a resolution of 16 G at 1 Hz movement. [ 17 ]. However, its sensitivity and resolution are size dependent.…”

Section: Introductionmentioning

confidence: 99%

Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

2022

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Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical accelerometers that are suitable for mass manufacture and previously mentioned in the literature have various problems and are only sensitive in one direction (1D). This study presents a novel optical accelerometer that provides 3D measurements while maintaining simple hybrid fabrication compatible with mass production. The operating concept is based on a power change method that allows for measurements without the need for complex digital signal processing (DSP). Springs hold the proof mass between a light-emitting diode and a quadrant photo-detector, allowing the proof mass to move along three axes. Depending on the magnitude and direction of the acceleration affecting the system, the proof mass moves by a certain amount in the corresponding axis, causing some quadrants of the quadrant detector to receive more light than other quadrants. This article covers the design, implementation, mechanical simulation, and optical modeling of the accelerometer. Several designs have been presented and compared. The best simulated mechanical sensitivity reaches 3.7 μm/G, while the calculated overall sensitivity and resolution of the chosen accelerometer is up to 156 μA/G and 56.2 μG, respectively.

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Section: Introductionmentioning

confidence: 99%

Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

2022

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“…Jia et al [ 28 , 29 , 30 ] designed and introduced a fiber grating vibration sensor with a cantilever structure, and in order to improve the sensitivity of acceleration signal measurement, further developed an FBG acceleration sensor based on the combination of a cantilever and sliding bar. Li et al [ 31 ] put forward a low-cost and high-sensitivity optical accelerometer assembled from a seismic mass, a leaf spring, and a sensing component based on a four-quadrant photodetector (QPD). Wang et al [ 32 ] reported a MEMS acceleration sensor based on a dual-ended tuning fork resonator, which is suitable for low-frequency and low-g acceleration measurement.…”

Section: Introductionmentioning

confidence: 99%

Measurement of Cable Force through a Fiber Bragg Grating-Type Thin Rod Vibration Sensor and Its Application

Zhu

Teng

Liu

et al. 2022

Sensors

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The key to evaluating the health status of cable-stayed bridges lies in the accuracy of cable force measurement. When measuring the cable force using the conventional frequency method, the clearance between the bracing cable and the protective tube is typically disregarded. Moreover, due to their large size, existing vibration sensors are difficult to install into protective tubes for steel strand-type bracing cables to measure the cable force. To address the above difficulties, a type of thin rod vibration sensor only 5 mm in diameter was designed based on the high sensitivity of Fiber Bragg grating (FBG), and high-throughput data processing software for engineering calculation (EC) was self-developed. Then, the recognition principle of the thin rod vibration sensor was theoretically analyzed and a step-by-step tension test was carried out. The results demonstrated that the relative error of the cable force measured by the thin rod vibration sensor within 12.865 Hz was less than 5% and the sensitivity reached 28.7 pm/Hz, indicating its high measurement precision. Upon subsequent application of the thin rod vibration sensor to a monitoring test in the field, the relative error of the fundamental frequency between artificial and natural excitations was less than 4%. In addition, the error relative to both the theoretical frequency and the third-party sampling frequency was less than 5%, further verifying the accuracy and applicability for monitoring the cable force of bridges under natural excitation. Compared with the traditional cantilever FBG sensor, the improved sensor with supporting data processing software has the advantages of small cross-section, high reliability, and good sensitivity. The research results can provide a reference for the subsequent accurate measurement of cable force and the development of a supporting sensor data processing system.

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“…Capacitive accelerometers have much higher sensitivity and cost than piezoelectric accelerometers. The second type is the accelerometers based on optoelectronic sensors, such as fiber Bragg grating (FBG) [12]- [17], focus probe [18], [19] and position detector [20]. The sensitivity and the minimum sensing frequency of the FBG accelerometer can reach 0.362 V/g and 1 Hz respectively [14].…”

Section: Introductionmentioning

confidence: 99%

“…In addition, they cannot detect vibrations with a frequency less than 3 Hz and their performances have not been tested and evaluated thoroughly. In the author's previous research [20], an optical accelerometer with a four-quadrant optical detector (QPD) was developed. It performed well in detecting low frequency vibrations (as low as 0.4 Hz).…”

Section: Introductionmentioning

confidence: 99%

A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

Chang

Lei

et al. 2019

IEEE Photonics J.

Self Cite

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A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V/g, a resolution of 3.0 × 10 -4 g, and a working frequency range of 1-10 Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0 × 10 -4 g (K = 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.

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Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Cited by 29 publications

References 30 publications

Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements

Measurement of Cable Force through a Fiber Bragg Grating-Type Thin Rod Vibration Sensor and Its Application

A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

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