Development of a large-area chip network with multidevice integration using a stretchable electroplated copper spring

Sung, Wei-Lun; Chen, Chih-Chung; Huang, Keliang; Fang, Weileun

doi:10.1088/0960-1317/26/2/025003

Cited by 13 publications

(9 citation statements)

References 29 publications

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“…The island bridge concept includes functional components firmly bonded to a soft substrate and interconnected via resemble wavy bridges that allow for large deformation, Figure 8a (left). [241] Engineering interconnect bridges using different architectures such as arced shapes, [241,242] serpentines, [243][244][245] spirals, [246][247][248][249] and helices [250][251][252] can further improve stretchability in functional devices. For instance, arced shapes are generated form straight 2D lines, while helical interconnect are formed from 2D serpentines, Figure 8b.…”

Section: Buckled Ribbons and Membranesmentioning

confidence: 99%

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Truong

Nguyen

Zhao

et al. 2021

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Transformation of conventional 2D platforms into unusual 3D configurations provides exciting opportunities for sensors, electronics, optical devices, and biological systems. Engineering material properties or controlling and modulating stresses in thin films to pop‐up 3D structures out of standard planar surfaces has been a highly active research topic over the last decade. Implementation of 3D micro and nanoarchitectures enables unprecedented functionalities including multiplexed, monolithic mechanical sensors, vertical integration of electronics components, and recording of neuron activities in 3D organoids. This paper provides an overview on stress engineering approaches to developing 3D functional microsystems. The paper systematically presents the origin of stresses generated in thin films and methods to transform a 2D design into an out‐of‐plane configuration. Different types of 3D micro and nanostructures, along with their applications in several areas are discussed. The paper concludes with current technical challenges and potential approaches and applications of this fast‐growing research direction.

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Section: Buckled Ribbons and Membranesmentioning

confidence: 99%

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Truong

Nguyen

Zhao

et al. 2021

Small

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“…Because of many well-known coupling effects, such as for example piezoresistivity or piezocapacity, the output electrical signal does not only depend on the original quantity to be measured, but also on the deformation of the substrate. This effect is commonly resolved using certain structural designs, including waves/wrinkles, [114][115][116][117][118][119] serpentine designs, [120][121][122][123][124] 2D spirals, [125][126][127][128] arc-shaped bridges, [129][130][131] noncoplanar serpentines, [132,133] helices, [134,[135][136][137] origami, [129,138,139] and kirigami. [140][141][142] However, such structural designs increase the complexity of fabrication, which has a visible impact on sensor reliability and cost.…”

Section: Introductionmentioning

confidence: 99%

Design Strategies for Strain‐Insensitive Wearable Healthcare Sensors and Perspective Based on the Seebeck Coefficient

Xin

Zhou

Nesser

et al. 2022

Adv Elect Materials

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The limited effectiveness of medical examinations has triggered the demand for 24-h monitoring technology. Wearable healthcare sensors are a promising option because they are small, light, wireless, and biocompatible with the human body. [8][9][10][11][12][13][14][15] Moreover, as they can potentially be organized in clouds, they can easily be combined with artificial intelligence (AI) to realize inexpensive intelligent systems for disease diagnosis and prevention. [16,17] Figure 1 shows that wearable healthcare sensors are classified in two categories: physical and chemical. Physical sensors include strain, temperature, touch and tactile, and pressure sensors. Wearable strain sensors are primarily used to monitor motion, breathing frequency, and pulse. [34] They should be able to sustain large deformation to accommodate the substrate, while at the same time they should have a high gauge factor to ensure highprecision recognition of small strains. Temperature sensors can both monitor the body temperatures of people with fever and monitor anesthetized people, predict ovulation times, and evaluate wound/postoperative recovery. [35,36] Touch and tactile sensors are then used as an artificial skin to help disabled persons with tactile sensations. [37][38][39][40][41] Wearable pressure sensors are extensively used in professional sports to enhance athletic ability and monitor health. [42][43][44] In the healthcare, pressure sensors detect small perpendicular deformations triggered by pulse and voice. [45][46][47] Physical sensors can be combined with prostheses to achieve multiple functions and help disabled people with missing limbs.Chemical sensors are used for health monitoring and detecting important organic-inorganic molecules serving as potential disease indicators. The human body performs multiple functions via biochemical reactions based on inorganic and organic materials. The concentration stability of organicinorganic molecules, such as bacteria, viruses, and uric acid, is important for health. [48][49][50] For example, a reduction in skin hydration level can lead to eczema, acne, itching, and even cracking of the stratum corneum, which makes people suffer and look older. [51] Chemical sensors can be used to monitor health by detecting important organic or inorganic molecules and their reactions. Existing chemical sensors detect potential disease based on certain indicators, such as humidity, [23,[52][53][54][55][56][57][58] hydration, [59][60][61][62][63] transcutaneous oxygen, [7,[64][65][66][67][68] vitamin A/B/C/D, [3,4,[69][70][71][72][73] hydrogen peroxide, [74][75][76][77][78] arrhythmia, [1,2] Large healthcare markets have been created in highly developed economies to improve the quality of life. Wearable healthcare sensors are attracting considerable interest because of their 24 h real-time monitoring capability, which make them useful in the detection of potential diseases. To guide the diagnosis, these sensors are designed to monitor various physical (e.g., pressure, temperature, strain, touch, bi...

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“…It has shown impressive results for the development of two-dimensional networks of nodes and interconnects obtained from a single silicon substrate. Appositely designed springs allow the network to conform to curved substrates and provide expansion ratios up to 121-fold [3], [4]. However, some authors have pointed out how silicon, and other conductors traditionally used in microfabrication, might not be the most suitable for the Several sensing nodes are placed at discrete locations inside the bladder wall, at the interface between the detrusor muscle and the inner mucosa.…”

Section: Introductionmentioning

confidence: 99%

Multi-layer embedded carbon fibres as highly compliant and stretchable interconnects

Brancato

Puers

2018

Flex. Print. Electron.

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This paper describes a unique technique to manufacture highly stretchable and implantable interconnects. A possible application is presented, where the interconnects are intended to create a network of nodes sensing biological parameters in e.g. the bladder wall. The interconnects are fabricated by embedding nickel-plated carbon fibres bundles first in a thin polyurethane tube and then in a soft, elastic, polydimethylsiloxane matrix. The insulation barrier properties of the proposed packaging technique were verified by a leakage current measurement performed in body mimicking media. The use of multiple thin fibres increases the amount of bending cycles before mechanical failure occurs. Carbon fibres possess extraordinary fatigue resistance and can withstand more than 160,000 deformation cycles under normal operating conditions without failing and displaying minimal impedance change. Patterning the polymeric matrix in a meander shape, along with the conductors, allowed to fabricate extremely compliant interconnects that can achieve large deformations in response to low tensile stress. Due to the carbon fibres strength, the only factor limiting the device's ultimate elongation is the geometrical length of the meandering structure itself. Even when stretched to its maximum, beyond normal operating conditions, the completely assembled device survived 20,000 loading cycles before failure of the polymeric coating. The proposed interconnects can follow the extensive deformation of the biological structures they are attached to, and can be stretched to 200% their original length with less than 0.1 N of applied force.

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Development of a large-area chip network with multidevice integration using a stretchable electroplated copper spring

Cited by 13 publications

References 29 publications

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems

Design Strategies for Strain‐Insensitive Wearable Healthcare Sensors and Perspective Based on the Seebeck Coefficient

Multi-layer embedded carbon fibres as highly compliant and stretchable interconnects

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