Development of a laser-focused ion beam combination machine

Yoshida, Yoshikazu; Masuzawa, T.; Ikeda, Hiromichi; Oguchi, Keigo; Yamagishi, Hikaru; Wakabayashi, Yuji

doi:10.1063/1.3258427

Cited by 2 publications

(3 citation statements)

References 2 publications

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“…FIB irradiation resulted in less than R a = 0.02 μm of the surface finish. 2 Values of the surface finish before and after finish machining were measured by a laser microscope, and there was lit- tle difference between them. However, microscopic asperities were smoothed as shown in Fig.…”

Section: Fabrication Of Die For Micro Lens Arraymentioning

confidence: 99%

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Laser and focused ion beam combined machining for micro dies

Yoshida

Okazaki

Uchida

2012

Review of Scientific Instruments

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We have developed a laser and focused ion beam (FIB) compound process for press mold dies of a micro lens array (MLA) and a micro needle array (MNA) in a glassy carbon (GC). The press mold die of the MLA was roughly fabricated by UV-YAG laser. After this process, we finished this surface by scanning FIB. As a result, higher accuracy and good roughness of surface profile can be realized. An optical glass is used to confirm the shape of lens. Moreover, we fabricated 6 × 6 through-holes in the GC by the spiral drilling in addition to the focus position movement of the UV laser for press mold die of the MNA. After the FIB process, we were able to make the needle die of surface and hole wall roughness less than 0.9 μm. A silicon rubber is used to confirm the shape of the holes.

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Section: Fabrication Of Die For Micro Lens Arraymentioning

confidence: 99%

“…1 We fabricated micro dies by the laser-FIB combined machining. 2 In this paper, we describe how to make micro dies in GC by means of laser-FIB combined machining.…”

Section: Introductionmentioning

confidence: 99%

Laser and focused ion beam combined machining for micro dies

Yoshida

Okazaki

Uchida

2012

Review of Scientific Instruments

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“…Thus, to obtain a designed surface texture within a reasonable form error, extensive trial and error is needed. Other examples of combined machining methods that follow the paradigm of the rough-finish sequential process are laser ablation followed by electrical discharge machining (EDM) [21], femtosecond laser milling followed by FIB finishing [22], and electrochemical discharge machining (ECDM) followed by micro grinding [23]. To the authors’ knowledge, there is no research into the combined machining of laser ablation and diamond cutting, especially for machining brittle materials, such as single crystal silicon.…”

Section: Introductionmentioning

confidence: 99%

Machining of Lenticular Lens Silicon Molds with a Combination of Laser Ablation and Diamond Cutting

Han

Lee

2019

Micromachines

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Lenticular lenses are widely used in the three-dimensional display industry. Conventional lenticular lens components are made of plastics that have low thermal stability. An alternative is to use glass to replace plastic as the lenticular lens component material. Single crystal silicon is often used as the mold material in the precision glass molding process. It is, however, difficult to fabricate a lenticular lens silicon mold that has a large feature size compared to the critical depth of cut of silicon. In order to solve the problems of machining lenticular lens silicon molds using the conventional diamond cutting method, such as low machining efficiency and severe tool wear, a hybrid machining method that combined laser ablation and diamond cutting was proposed. A feasibility study was performed to investigate the possibility of using this method to fabricate a lenticular lens silicon mold. The influence of the laser parameters and machining parameters on the machining performance was investigated systematically. The experimental results indicated that this hybrid machining method could be a possible method for manufacturing lenticular lens silicon molds or other similar microstructures.

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Development of a laser-focused ion beam combination machine

Cited by 2 publications

References 2 publications

Laser and focused ion beam combined machining for micro dies

Laser and focused ion beam combined machining for micro dies

Machining of Lenticular Lens Silicon Molds with a Combination of Laser Ablation and Diamond Cutting

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