This paper presents a new type of micro self-powered wireless analog sun sensor. The mask with aperture of the sun sensor, developed by glass coated process, reduces the impact on accuracy caused by second reflection of the light, and also promotes system’s external thermal radiation ability. With aluminum substrate process, the processing circuit is integrated on the bottom cover of the sun sensor, which saves the conventional processing circuit needed space and reduces the complexity of system’s structure. Self-powered and wireless data transmission improve the system’s application flexibility. The simulation results and preliminary experiments show that the accuracy of the system has the ability to reach 0.2° in the whole 120°×120° FOV and the solar cells’ minimum output power is 90mW which is able to meet the power consumption requirements of the system circuits.