Development of a Measuring System for the Measurement of Motions Errors of a Linear Stage

Abstract

A high precision six-degree-of-freedom measuring system is developed in this paper for the motion measurement of a linear stage. It integrates a miniature dual-beam fiber coupled laser interferometer with the multiple optical paths and quadrant detectors to be capable of measuring six-degree-of-freedom motion errors. The proposed measuring method provides rapid performance, simplicity of setup, and pre-process verification of a linear positioning stage. The experimental setup and algorithm for the error verification are presented in the paper. The measuring range of the proposed measuring system is ±40μm for straightness and 40 arc sec for pitch, roll and yaw. Within the range of ±40μm and 40 arc sec, it has been found that the system’s resolution and accuracy of measuring straightness error components are about 0.04 μm and ±0.06 μm, respectively. The resolution and accuracy of measuring pitch and yaw angular error components are about 0.06 arc sec and ±0.8 arc sec, respectively. The resolution and accuracy of measuring roll angular error are about 0.05 arc sec and ±0.07 arc sec, respectively.