Development of a Micro/Nano Probing System Using Double Elastic Mechanisms

Abstract

To meet the requirement of high precision measurement of coordinate measurement machine system, a compact microprobe has been designed for 3D measurement in this paper. Aiming to reduce the influences of signal coupling during the probing process, the probe has been designed by adopting two elastic mechanisms, in which the horizontal and vertical motions of the probe tip can be separated by differential signals of quadrant photodetectors in each elastic mechanism. A connecting rod has been designed to transfer the displacement of the probe tip in vertical direction from lower to upper elastic mechanisms. The sensitivity models in horizontal and vertical directions have been established, and the sensor sensitivity has been verified through experiments. Furthermore, the signal coupling of three axes has been analyzed, and mathematical models have been proposed for decoupling. The probing performance has been verified experimentally.

Uncertainty evaluation for dynamic identification of a micro contact probe based on the signal transmission chain analysis method

“…Many micro probes have been developed to characterize 3D micro-components in previous years [1][2][3][4]. The components have millimeter-scale to micrometer-scale features and require nanometer to submicron measurement accuracy, such as micro holes, micro lens, micro fluid channels or other micro 3 Author to whom any correspondence should be addressed.…”