Development of a microstructured surface using the FIB

Goswami, Arjyajyoti; Umashankar, R.; Gupta, Anjan K.; Aravindan, S.; Rao, P.V.

doi:10.1177/2516598418765357

Cited by 11 publications

(4 citation statements)

References 25 publications

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“…Various techniques were used to fabricate micro-patterns on mold like lithographic/etching technology, for instance, UV-ray and x-ray lithography [37], plasma etching and electron beam etching [38,39], focused ion beam machining [40], micro-milling [41][42][43], micro-EDM [44], CNC milling [45,46], laser ablation [47][48][49][50][51], etc The combination of micro or nano mold inserts with macro mold tools may be used to produce micro or nano elements. Micro and nano-combined components may be mass-produced; a HE procedure is provided.…”

Section: Micro Hot Embossing Processmentioning

confidence: 99%

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

Datta

Deshmukh²,

Kar³

et al. 2023

Eng. Res. Express

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Micro-hot embossing (micro-HE) of polymeric materials creates exact micro/nanoscaled designs. Micro-HE processes include plate-to-plate (P2P), roll-to-roll (R2R), and roll-to-plate (R2P). Micro-HE is preferred for large-scale production of micro-patterns on polymer substrates. However, the lack of simulation models for optimization and component design prevents the broad use of this technology. As the size of the micro patterns decreases from micron to sub-micron, it improves performance features. Micro-HE cannot be analyzed using software tools like injection molding since there is no macroscopic equivalent. Commercial simulation software covers injection molding and associated processes. No commercial tool covers all micro-HE process steps, variations, and boundary conditions. According to the authors, such review articles aren't in the literature. This article summarizes the simulation work in the micro-HE process field related to replication accuracy, and mold filling behaviour. In addition to this, various models were discussed based on properties of material, based on various forces participating in the HE process, and gives a detailed idea about mold-filling behavior and demolding analysis. Finally challenges and future scope related to modelling and simulation work in field of hot embossing has been presented.

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Section: Micro Hot Embossing Processmentioning

confidence: 99%

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

Datta

Deshmukh²,

Kar³

et al. 2023

Eng. Res. Express

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show abstract

“…The penetration range of ions into the solids depends upon the atomic number of the ion species as the penetrating ions lose their energy by the electronic and nuclear energy losses. 80 Larger the atomic number, lesser will be the penetration depth into the target material at a given acceleration energy. Helium ions being the lightest (atomic weight 4) exhibit the penetrations range of the order of 300 nm, while heavy xenon ions (atomic weight 131) penetrate about 25 nm in the silicon.…”

Section: Focused Ion Beam: Technology and Applicationsmentioning

confidence: 99%

Micromachining: An overview (Part I)

Jain

Balasubramaniam

Mote

et al. 2020

Journal of Micromanufacturing

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This article gives classification of micromanufacturing in general and micromachining processes in particular. For different micromachining processes, one can have different kinds of operations through which different features, shapes, accuracy, precision, and dimensions can be achieved. This article as Part I reports an overview of only three processes as diamond turn machining (a class of traditional micromachining processes), electrochemical micromachining, and focused-ion-beam micromachining (a class of advanced micromachining processes). About all these three processes, a brief introduction to the mechanisms of material removal is reported followed by the new developments in each process which are discussed independently. In various sections, some areas where research work needs to be done are identified and very briefly discussed.

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“…High feature resolution, high speed of processing, the low unit cost of manufacturing, the production of novel geometries, and rapid prototyping capabilities are vital in the evolution of many industrial sectors such as microelectronics, aerospace, defense, semiconductors, wafer processing, optics, telecommunications, and biotechnology. [1][2][3][4] In the last decades, there has been a significant advancement in various manufacturing processes such as focused ion beam machining, 5,6 electrochemical machining, 7 electric discharge machining, [8][9][10] and micromilling 11 for the manufacturing of complicated features. 12 All these processes have their own advantages and limitations in manufacturing.…”

Section: Introductionmentioning

confidence: 99%

Analytical study for the selection of mask size and shape for obtaining high machining quality of complex features

Singh

Sharma

Kumar

et al. 2023

Journal of Micromanufacturing

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In this article, an analytical study of the effect of the shape and size of the mask on the machining quality of complex shapes has been carried out. For this study, we considered square and circular masks of varying sizes with varying overlap for the machining of square, inclined, and circular features. Mask size varied from 1 to 20 mm, while overlap varied from 10% to 90%. The machining quality of the aforementioned features was evaluated by studying the unmachined area “An” (in the machining zone) and the machining time “Tm.” For machining a similar feature, it was observed that the square mask performed much better than the circular mask in minimizing the machining time. However, the circular mask is much more suitable for minimizing the unmachined area. For validation, the experiment was conducted to machine the inclined lines with square and circular shape masks with varying overlap percentages. The experimental results were found to be in good agreement with the analytically obtained results, with an error of 2.5%. This study is relevant for the industrial-scale manufacturing of complicated features using the mask projection approach in laser machining.

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Development of a microstructured surface using the FIB

Cited by 11 publications

References 25 publications

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

Micromachining: An overview (Part I)

Analytical study for the selection of mask size and shape for obtaining high machining quality of complex features

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