The concept of superheated steam (SS) was proposed over a century ago and has been widely studied as a drying method. SS processing of cereals and cereal products has been extensively studied in recent years for its advantages of higher drying rates above the inversion temperature, oxygen‐free environment, energy conservation, and environmental protection. This review provides a brief introduction to the history, principles, and classification of SS. The applications of SS processing in the drying, enzymatic inactivation, sterilization, mycotoxin degradation, roasting, and cooking of cereals and cereal products are summarized and discussed. Moreover, the effects of SS processing on the physicochemical properties of cereals and the qualities of cereal foods are reviewed and discussed. The applications of SS for cereal processing and its effects on cereal properties have been extensively studied; however, issues such as the browning of cereal foods, thermal damage of starch, protein denaturation, and nutrition loss have not been comprehensively studied. Therefore, further studies are required to better understand the mechanism of the quality changes caused by SS processing and to expand the fields of application of SS in the cereal processing industry. This review enhances the understanding of SS processing and presents theoretical suggestions for promoting SS processing to improve the safety and quality of cereals and cereal products.