Development of a Novel Three Degrees-of-Freedom Rotary Vibration-Assisted Micropolishing System Based on Piezoelectric Actuation

Abstract

The limited degrees of freedom (DOF) and movement form of the compliant vibration-assisted processing device are inherent constraints of the polishing technique. In this paper, a concept of a 3-DOF rotary vibration-assisted micropolishing system (3D RVMS) is proposed and demonstrated. The 3-DOF means the proposed vibration-assisted polishing device (VPD) is driven by three piezo-electric (PZT) actuators. Compared with the current vibration-assisted polishing technology which generates a trajectory with orthogonal actuators or parallel actuators, a novel 3-DOF piezoelectrically actuated VPD was designed to enable the workpiece to move along the rotational direction. Meanwhile, the proposed VPD can deliver large processing stoke in mrad scale and can be operated at a flexible non-resonant mode. A matrix-based compliance modeling method was adopted for calculating the compliance and amplification ratio of the VPD. Additionally, the dynamic and static properties of the developed VPD were verified using finite element analysis. Then, the VPD was manufactured and experimentally tested to investigate its practical performance. Finally, various polished surfaces which used silicon carbide (SiC) ceramic as workpiece material were uniformly generated by the high-performance 3D RVMS. Compared with a nonvibration polishing system, surface roughness was clearly improved by introducing rotary vibration-assisted processing. Both the analysis and experiments verified the effectiveness of the present 3D RVMS for micro-machining surfaces.

Investigation on Enhanced Machinability of SiC Ceramics through Photocatalytic Vibration Composite Polishing

“…The polishing experimental results showed that the MRR was increased by 24.1−33.7%, and as the vibration parameter (amplitude and frequency) increased, the Sa decreased. Gu et al 23 developed a three-degree-of-freedom rotational vibration-assisted micropolishing device (3D RVMS) and applied it to SiC polishing. The results showed that Sa was 0.2 μm without vibration and 0.035 μm with 3D RVMS.…”

Dynamic Analysis and Experiment of 6-DOF Compliant Platform Based on Bridge-Type Amplifier

“…Yu et al [ 27 ] analyzed the inverse dynamics of the 8R compliant mechanism based on Structural dynamics to model the compliant mechanism. Go et al [ 28 ] proposed a concept of a 3-DOF rotary vibration-assisted micropolishing system (3D RVMS) and determined the dynamic and static performances based on compliance matrix method and FEA. In this paper, we established a complex dynamic model of a 6-DOF platform and considered the damping dissipation in the process of establishing a dynamic model with the Lagrange equation.…”