Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism

Abstract

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A novel stick-slip based linear actuator using bi-directional motion of micropositioner

“…The compliance matrix has been widely used in the static modeling of the flexure-based mechanisms [7][8][9][10]15], and it has shown good property in the application, so this method is selected in this paper. The compliance matrixes C 0c and C 0l of the right circular flexure hinge and the leaf-spring flexure hinge in the local coordinate are listed as following equation.…”

“…Based on the driving principles, the piezoelectric actuators can be divided into three types: direct driving actuators, inchworm actuators, stick-slip actuators. The direct driving actuators are easy to obtain the nano positioning resolution, but the working space is usually only several micrometers [9][10][11][12]. In order to enlarge the stroke, the amplification mechanisms including lever mechanism [13,14], bridge-type mechanism [15] and Scott-Russell mechanism [16,17] are designed in the positioning stage.…”

Design and control of a 6-degree-of-freedom precision positioning system

“…According to the space geometric relationship, the following relationship can be obtained: (15) whereθ x and θ y arethe angle rotation about the X and Y-axes of the coordinate systemO-XY, respectively.δ 4 , δ 5 , δ 6 arethe elongation of the PEAs in the 3-DOF stage.…”

“…Li et al proposed a parallel-kinematic high-bandwidth XY nanopositioningstage [14].Cai et al [15].focused on designa planar 3-DOF stage with T-shape flexible hinge mechanism. In addition, there have also been some out-of-plane positioning systems.…”

“…From the above literature review, it can be seen that most of the existing precision positioning systems are featured by oneto three-DOF motions [10][11][12][13][14][15][16][17][18][19][20][21][22], which cannot meet the needs of manipulations in some cases. For example, an atomic force microscope designed for nanometrology in Ref.…”