“…In recent years, micropumps have been developing rapidly with extensive potential applications in the fields of biological instruments (Amirouche et al, 2009; Yang et al, 2016), medical treatment (Iverson and Garimella, 2008; Ma et al, 2015), lab-on-a-chip (LOC) devices (Pan and Wang, 2016; Zhang and Eitel, 2013), drug delivery systems (Tandon et al, 2016; Tsai and Sue, 2007), micro total analysis systems (µTAS; Iijima et al, 2017; Zhang and Eitel, 2013), and electronics cooling (Bayomy et al, 2016; De Lima et al, 2009; Ham et al, 2009). There have been a great number of micropump operating mechanisms to control the precise fluid from micro-scale to macro-scale (Amirouche et al, 2009; Tandon et al, 2016; Tsai and Sue, 2007).…”