A mode analysis technique of the millimeter-wave which propagates in the corrugated waveguide of the electron cyclotron resonance heating (ECRH) transmission line is proposed. The technique is based on the signals detected by beam-profile monitors (BPMs) developed and installed in the reflection plane mirror of the miterbends in the ECRH transmission line. The developed BPM consists of a mirror plate, Peltier-device array, and a heat-sink. The voltage signal of each Peltier device is related with the temperature of the mirror surface. The program which can analyze propagating-mode components using these signals is developed. The possibility of the propagating mode analyses using this code was confirmed using the artificially synthesized model data on the miterbend reflector.