2018
DOI: 10.1016/j.ijmecsci.2018.09.039
|View full text |Cite
|
Sign up to set email alerts
|

Development of a three-DOF piezoelectric actuator using a thin cross-beam vibrator

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
5

Citation Types

0
18
0

Year Published

2019
2019
2025
2025

Publication Types

Select...
9

Relationship

1
8

Authors

Journals

citations
Cited by 50 publications
(18 citation statements)
references
References 31 publications
0
18
0
Order By: Relevance
“…Various type 3DOF actuators have been proposed and developed. Multi-DOF piezoelectric [7,8] and ultrasonic actuators [9][10][11][12] are driven using a mechanical contact. They have a high holding force and a simple structure.…”
Section: Introductionmentioning
confidence: 99%
“…Various type 3DOF actuators have been proposed and developed. Multi-DOF piezoelectric [7,8] and ultrasonic actuators [9][10][11][12] are driven using a mechanical contact. They have a high holding force and a simple structure.…”
Section: Introductionmentioning
confidence: 99%
“…Wang and et al reported on the 3-DOF motor based on cross-beam structure [13]. The motor was based on cross-beam shaped stator with 16 piezo ceramic plates which were glued around the free end of each beam.…”
Section: Introductionmentioning
confidence: 99%
“…The flexure hinge enables smooth and continuous movement via elastic deformation. PZT actuators have been widely used as fine-positioning-devices because of their advantages such as high positioning resolution, high generative force, high response speed and easy miniaturization (Fantoni et al , 2018; Wang et al , 2018; Chen et al , 2019; Jian et al , 2019). Therefore, many studies have been conducted on the design and manufacture of precision-positioning stages using flexure hinges and PZT actuators (Park et al , 2007; Jung and Kim, 2014; Clark et al , 2015; Qin et al , 2019; Tian et al , 2019; Zhang et al , 2020).…”
Section: Introductionmentioning
confidence: 99%