Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer composite

Suzuki, Junya; Onishi, Yoshiyuki; Terao, Kyohei; Takao, Hidekuni; Shimokawa, Fusao; Oohira, Fumikazu; Miyagawa, Hayato; Namazu, Takahiro; Suzuki, Takao

doi:10.7567/jjap.55.06gp01

Cited by 9 publications

(8 citation statements)

References 30 publications

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“…It is known that the driving coil is designed in involute mode [16], and the length of each straight line increases from inside to outside. Therefore, under the action of different magnetic field intensity, the force generated by each straight driving coil is also different [17,18]. In the specific simulation, the force calculated by the Equations ( 1) and ( 2) is applied on the both sides of the micromirror, and the mechanical performance of the ISM is obtained and analyzed by recording the stress value and displacement generated by the simulation.…”

Section: Simulation Analysis and Designmentioning

confidence: 99%

Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

Chen

2021

Micromachines

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In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis, and experimental test are carried out, respectively. By changing the force form and external magnetic field of the device, the mechanical scanning angle, driving voltage, and resonant frequency of the electromagnetic ISM will be changed accordingly, and then the change of the working performance of the ISM is explored. Through the optimization analysis and comparative test, the optimal design scheme of driving system is obtained, and the effect of driving system on the working performance of the electromagnetic ISM is verified. The experimental results show that by optimizing the structure of the driving system, the mechanical scanning angle of the electromagnetic ISM is increased by about 20%, and the driving voltage is decreased about 10% observably, and the working performance of the electromagnetic ISM is significantly improved. The research results have important significance and practical application value for the extended application of the electromagnetic ISM in the field of optical detection.

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Section: Simulation Analysis and Designmentioning

confidence: 99%

Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

Chen

2021

Micromachines

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“…1) The approaches to actuate a micromirror can be simply classified into four categories: electrostatic, 2,3) piezoelectric, [4][5][6] electrothermal [7][8][9] and electromagnetic. [10][11][12][13][14][15] The scanning angle of an electrostatic micromirror and a piezoelectric micromirror are relatively small and high voltage is required. As for an electrothermal micromirror, its mechanical property is non-linear, which increases the complexity of control.…”

Section: Introductionmentioning

confidence: 99%

Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator

Lin

Keikoin³

et al. 2019

Jpn. J. Appl. Phys.

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A 2D MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator is studied and proposed. Fe-based metallic glass is an amorphous metal that has excellent mechanical and magnetic properties. In this paper, Fe-based metallic glass is used as magnetic actuation material and torsion bar structure material. The Fe-based metallic glass thin film deposited on a micromirror surface is used as magnetic material that can be magnetically polarized by permanent magnets. Besides, the micromirror consists of two pairs of metallic glass torsion bars to achieve 2D scanning. The excellent mechanical properties of metallic glass were used for increasing the strength and reliability of the micromirror. The fabricated 2D micromirror can be actuated by an electromagnetic solenoid in dual resonant modes. The result shows that the scanning angle of the outer slow axis is 11°at 800 Hz and that of the inner fast axis is 90°at 5249 Hz.

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“…In the past decades, many micro-electro-mechanical systems (MEMS) devices have been developed [1][2][3][4][5][6][7] because of their many advantages such as miniaturization, power saving, higher functionality, and lower cost. These MEMS devices having structures from sub-micrometer to sub-millimeter are often fabricated by photolithography, [3][4][5][6][7] electron-beam lithography, 2,6,8) and embossing.…”

Section: Introductionmentioning

confidence: 99%

Seamless fabrication technique for micro to millimeter structures by combining 3D printing and photolithography

Tamura

Suzuki

2019

Jpn. J. Appl. Phys.

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This paper proposes a seamless fabrication technique for micro-electro-mechanical systems (MEMS) devices having structures from micrometer to millimeter with a single material by combining 3D printing and photolithography. The proposed fabrication technique combines the fabrication characteristics of 3D printing and photolithography. We fabricated a mold of a microfluidic device having micro-and millimeter structures and evaluated three characteristics of the proposed technique. From the evaluations, the micro-to millimeter structures were seamlessly fabricated with an error within ±5%. The rough surface of the resist transferred from a 3D-printed master mold causes irregular reflection of UV light and reduction in patterning accuracy. The relation of object shape and fabrication of millimeter structures was evaluated. In addition, various advantages of the proposed fabrication technique were confirmed by demonstrating a fluid transportation test for the fabricated microfludic device.

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Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer composite

Cited by 9 publications

References 30 publications

Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

Two-dimensional MEMS Fe-based metallic glass micromirror driven by an electromagnetic actuator

Seamless fabrication technique for micro to millimeter structures by combining 3D printing and photolithography

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