2020
DOI: 10.1016/j.optlaseng.2020.106179
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Development of a wide-width raster scanning optical system for high-resolution ultraviolet laser direct micro-patterning

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“…The grating scanning system needs to split the 250-600nm complex light [29]. The sinusoidal mechanism is added to the grating spectrometer to improve the scanning resolution.…”
Section: B Design Of Grating Scattering and Scanning Systemmentioning
confidence: 99%
“…The grating scanning system needs to split the 250-600nm complex light [29]. The sinusoidal mechanism is added to the grating spectrometer to improve the scanning resolution.…”
Section: B Design Of Grating Scattering and Scanning Systemmentioning
confidence: 99%