2022
DOI: 10.1088/1402-4896/ac4c52
|View full text |Cite
|
Sign up to set email alerts
|

Development of an analytical model of work function modulated GAA MOSFET for electrostatic performance analysis

Abstract: This paper describes a continuous and almost linearly modulated work-function adjustment between 4.8-4.2eV using Hf-Mo binary alloy. The work-function modulated (WM) metal gate is applied to a gate all around MOSFET (GAA) for better electrostatic control. The threshold voltage is tuned by linearly modulating the gate metal work function. The threshold voltage extracted for dual-GAA MOSFET is initially 0.705 V. However, introducing work-function modulation, the threshold voltage is shifted to 0.620 V for WMGAA … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
4
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(4 citation statements)
references
References 21 publications
0
4
0
Order By: Relevance
“…Furthermore, to calculate the cut-off frequency (f T ) [35], it is necessary to determine the total gate capacitance (C gg ) as shown in equation (2).…”
Section: Analysis Of Analog/rf Parametersmentioning
confidence: 99%
See 1 more Smart Citation
“…Furthermore, to calculate the cut-off frequency (f T ) [35], it is necessary to determine the total gate capacitance (C gg ) as shown in equation (2).…”
Section: Analysis Of Analog/rf Parametersmentioning
confidence: 99%
“…The continuous miniaturization of MOSFETs escalates the stand-by power dissipation due to increased shortchannel effects (SCEs) and inability of achieving a low subthreshold swing (SS) (i.e. <60 mV/decade at 300 K), which further affect the device suitability in modern integrated circuits [1,2]. Among all devices suggested in literature, Tunnel FETs (TFETs) are considered to be the most promising substitute for MOSFETs in current IC technology [3][4][5].…”
Section: Introductionmentioning
confidence: 99%
“…As a result, bulk-silicon transistors are experiencing the same difficulties as MOSFETs due to the presence of Short Channel Effects (SCEs) [1]. To minimize these SCEs, novel device architectures such as Double gate (DG) FET [2][3][4], FinFET [5][6][7], Quadraple gate FET [8,9], and gate all around (GAA) FET [10][11][12][13][14] are introduced in the literature. However, DG FETs poses a challenge in the symmetrical alignment of the front and back gates.…”
Section: Introductionmentioning
confidence: 99%
“…Like conventional MOSFET, NCFET devices also have the same diffusion and drift electron transport mechanism, aiming to drive a higher current than tunnel-based FETs because of the greater channel charge thickness brought by intensified Ψ s at the same off-current. Therefore, NCFET has drawn attention because it can break down the classical minimum limit of Subthreshold Swing, SS = 60 mV/dec with a higher drive current than the conventional MOSFET at the same voltage condition, which is more advantageous while production of new device technology [11][12][13][14]. Further, with the advantage of steep slope value, NCFET has many obstacles during its fabrication process.…”
Section: Introductionmentioning
confidence: 99%