Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

Hung, Min Hsiung; Chen, Kuan Yii; Ho, Rui Wen; Cheng, Fan‐Tien

doi:10.1016/j.aei.2004.07.004

Cited by 40 publications

(13 citation statements)

References 5 publications

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“…The main subsystems of WSDF [5], [6] include equipment with embedded agents (EEA), on-site diagnostics/maintenance server (ODMS) and database [local diagnostics/maintenance database (LDMD)], advanced process control (APC) and overall equipment effectiveness (OEE) server, on-site diagnosability/maintainability evaluator (ODME) server, remote diagnostics/maintenance server (RDMS) and database [global diagnostics/maintenance database (GDMD)], and remote diagnosability/maintainability evaluator (RDME) server. To ensure the security of information access, WSDF incorporates an authentication service (AS) mechanism.…”

Section: A Architecturementioning

confidence: 99%

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A Web Services-Based Collaborative Planning, Forecasting, and Replenishment (CPFR) Framework for Managing Spare Parts of Semiconductor Equipment

Chen

Hsu³

et al. 2009

IEEE Trans. Semicond. Manufact.

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In a semiconductor foundry, equipment failure has long been recognized as a major cause of unpredicted breakdown which results in an excessive production loss. Equipment maintenance management is one of the essential tasks in semiconductor manufacturing. Due to the prosperity of Internet and IT, e-diagnostics and e-maintenance through the web have become important applications in the semiconductor industry. Web services (WSs) can assist the data integration in heterogeneous e-manufacturing systems to support faster and remote maintenance functions. In this paper, a WS-based collaborative planning, forecasting and replenishment (CPFR) framework, namely WS-CPFR, is developed to collaboratively manage the logistics activities of spare parts in semiconductor equipment between equipment suppliers and semiconductor factories.

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Section: A Architecturementioning

confidence: 99%

“…In practice, however, most business applications of WSs focus on intra-organizational integration rather than inter-organizational integration. WSs can enable information integration among heterogeneous systems in the modern e-manufacturing environment [5], [6].…”

Section: Introductionmentioning

confidence: 99%

A Web Services-Based Collaborative Planning, Forecasting, and Replenishment (CPFR) Framework for Managing Spare Parts of Semiconductor Equipment

Chen

Hsu³

et al. 2009

IEEE Trans. Semicond. Manufact.

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“…By using the e-Maintenance concept it is possible to achieve the integration of distributed knowledge, information and data in order to perform the equipment analysis, diagnosis tasks and to propose the best actions to maintain the well-working at the adequate time intervals (decision-making support). In [23], information software and object-oriented technologies as Web-services and XML have been used in order to propose a framework for the development of e-Diagnostic and e-Maintenance permitting to achieve the automation of diagnosis processes and their integration with the maintenance information. By the other hand, in order to perform the integration of the distributed experted knowledge, a MAS-based framework is proposed in [22,24] for accomplishing the cooperation, coordination and negotiation process between the main actors that have this knowledge: (i) production management, (ii) control expert and (iii) maintenance expert.…”

Section: Fault Management and Preventive Maintenancementioning

confidence: 99%

“…From a distributed point of view, the e-Maintenance concept born as an evolution of the concept and techniques of e-Service and Tele-Service, in order to integrate monitoring, performance assessment methods and technologies, [12, [22][23][24]. By using the e-Maintenance concept it is possible to achieve the integration of distributed knowledge, information and data in order to perform the equipment analysis, diagnosis tasks and to propose the best actions to maintain the well-working at the adequate time intervals (decision-making support).…”

Section: Fault Management and Preventive Maintenancementioning

confidence: 99%

Agents-based design for fault management systems in industrial processes

Cerrada

Cardillo

Aguilar

et al. 2007

Computers in Industry

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“…Modern information technologies also benefit Engineering Asset Management (EAM). For example, e-Diagnostics and e-Maintenance have been proposed to provide the prompt diagnosis, repair and maintenance of equipment in the semiconductor industry (Hung et al 2003).…”

Section: Introductionmentioning

confidence: 99%

Re-engineering transformer maintenance processes to improve customized service delivery

Trappey

Sun

Trappey

et al. 2011

J. Syst. Sci. Syst. Eng.

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The outage of a transformer in a power generation system will generally result in a shutdown of the entire system. Consequentially, large amounts of revenue are lost to the plant owner with a substantial negative impact on the civil community and industrial customers. This paper analyzes the current maintenance practices (i.e., an as-is process model) of a transformer manufacturing company, which provides maintenance services to power generation plants and reports the major weaknesses in current business practices. The maintenance weaknesses include isolated processes and paper based information communication. These inefficient processes result in service delays, cost increases, and inappropriate responses to customers' specific requests and complaints. To improve the efficiency and flexibility of the entire transformer maintenance service system, an e-integration approach is implemented with three key tasks. First, the current business processes are re-engineered to provide an improved (to-be) business model. Then, we replace paper based documentation methods with an electronic filing system for efficient and cost-effective information exchange. Afterward, the improved process model is implemented as an Internet based system to enhance the interactions among the transformer manufacturer, end-users, and service contractors for customized maintenance services. The case study demonstrates that implementing the e-integration approach increases the efficiency and effectiveness of the customized maintenance services.

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Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

Cited by 40 publications

References 5 publications

A Web Services-Based Collaborative Planning, Forecasting, and Replenishment (CPFR) Framework for Managing Spare Parts of Semiconductor Equipment

A Web Services-Based Collaborative Planning, Forecasting, and Replenishment (CPFR) Framework for Managing Spare Parts of Semiconductor Equipment

Agents-based design for fault management systems in industrial processes

Re-engineering transformer maintenance processes to improve customized service delivery

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