2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 2016
DOI: 10.1109/dtip.2016.7514891
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Development of an elementary micromachined electromagnetic digital actuator for microdisplacements

Zhichao Shi
1
,
B. Bélier
2
,
Émile Martincic
3
et al.
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