Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing

Hamamura, Y.; Matsumoto, Chizu; Tsunoda, Y.; Kamoda, Koji; Iwata, Yoshio; Kanamitsu, Kenji; Fujiki, Daisuke; Kojika, Fujihiko; Fujita, Hiromi; Nakagawa, Yasuo; Kaneko, Shun’ichi

doi:10.1587/transele.e92.c.144

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Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing

Cited by 3 publications

References 10 publications

Failure rate estimation of each process layer using critical area analysis and failing bit results

Failure rate estimation of each process layer using critical area analysis and failing bit results

Advanced Method for Defect Characterization Using Fail Bit Analysis and Critical Area Simulation

A New Critical Area Simulation Algorithm and Its Application for Failing Bit Analysis

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