Development of an Optimized Three-Axis Fast Tool Servo for Ultraprecision Cutting

Chen, Yuan-Liu; Li, Zhongwei; Chen, Fuwen; Lin, Huanbin; Ju, Bing‐Feng; Liu, Yi

doi:10.1109/tmech.2021.3109696

Cited by 15 publications

(5 citation statements)

References 28 publications

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“…In order to verify the effectiveness of the proposed method, experiments were conducted, as shown in figure 4. The prototype system includes a customized precise linear stage with stroke of 15 µm and positioning accuracy of 5 nm [24] to provide the driving force, a commercial force gauge (HANDPI, stroke 5 N, resolution 0.001 N), a piezoelectric ceramic piece (NAC2123, COREMORROW) integrated with a framework designed in our previous research [14], a temperature sensor (PT100, OMEGA), a homemade charge amplifier (composed by a precision amplifier chip (LMP7721MA, TI), a feedback resistance of 100 MΩ and a feedback capacitance 2 nF, power supply 4 V) and an acquisition card (NI PCI-6363, National Instruments Corporation). The experiment conditions are as follow: environment temperature (24 ± 0.5) • C, environment humidity 60% − 65%, which is consistent with the status that the piezoelectric sensor is usually used in ultra-precision field with strict working environment of constant temperature and humidity.…”

Section: Experiments Setupmentioning

confidence: 99%

“…Since the commercial force gauge has a resolution of only 1 mN, it is impossible to detect forces on the order of sub-millinewtons by the force gauge. On the basis of calibrating the relationship between the loaded force and the driving distance of the precise linear stage, the magnitude of the ultra-low force loaded can be obtained by reading the driving distance of the precise linear stage with a constant stiffness of 30 N µm −1 [24]. Results of measurement resolution of the proposed method are illustrated in figure 19.…”

Section: Measurement Resolutionmentioning

confidence: 99%

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Development of a novel strategy based on in-process compensation of charge leakage for static force measurement by piezoelectric force sensors

Chen

Lin

et al. 2023

Smart Mater. Struct.

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Ordinary piezoelectric force sensors are only capable of measuring dynamic forces but not static forces because of the charge leakage due to the finite resistance of piezoelectric materials and charge amplifiers. This paper presents a new strategy for in-process compensation of charge leakage for force measurement with wide spectrum from static to dynamic realized by piezoelectric force sensors. The compensation is in-process operated based on the concept of dynamic accumulation. In order to improve the measurement accuracy and long-term stability by the compensation, the zero offset generated by normalization, bias current and temperature drift are all theoretically analyzed and experimentally validated. Measurement experiments of four different types of force signals, which contain static, triangle, sinusoidal and random force signals acting on the piezoelectric force sensor, are conducted to validate the proposed strategy. In addition, the effect of different time constant of the piezoelectric sensor under different applied forces on the compensated results is analyzed. Performance tests contain accuracy, resolution, span and bandwidth have been conducted. It is validated that the proposed method has high sensitivity of sub-millinewton, long-term stability and wide spectrum from static signal to dynamic measurement capabilities, which would provide an effective and precise method for micro force measurement and control in ultra-precision machining, semiconductor industry and biomechanics fields.

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Section: Experiments Setupmentioning

confidence: 99%

Section: Measurement Resolutionmentioning

confidence: 99%

Development of a novel strategy based on in-process compensation of charge leakage for static force measurement by piezoelectric force sensors

Chen

Lin

et al. 2023

Smart Mater. Struct.

Self Cite

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show abstract

“…The fast-tool-servo cutting can fabricate non-rotationally symmetric nanostructure arrays [44]. The additional attachment for the tool drive in the fast-tool-servo cutting is called the vibration generator, which is commonly piezoelectrically driven with high bandwidth and high stiffness [45].…”

Section: Fast-tool-servo Cuttingmentioning

confidence: 99%

Ultraprecision tool-servo cutting of pure nickel for fabricating micro/nanostructure arrays

Jiang

Zhu

et al. 2022

Materials & Design

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“…nanomanipulating systems for single-point diamond tools are often needed to machine the complicated and irregular microstructures [4]. A high-speed and high-accuracy nanopositioning stage of sample is usually required in atomic force microscopy [5] and scanning electron microscopy [6].…”

Section: Introductionmentioning

confidence: 99%

Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system

Yang,

Liu,

Zhu

et al. 2024

J. Micromech. Microeng.

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A novel monolithic compliant Lorentz-force-driven XY nanopositioning system (MCLNS) is designed, analyzed, and experimentally assessed with the aim of high-resolution positioning across a large workspace. A double-symmetric Lorentz-force actuator (DSLA) with the benefits of zero friction, high thrust, and large stroke is proposed to generate the actuation force. Correspondingly, a monolithic four-prismatic parallel compliant mechanism (4P-PCM) is exploited to transmit the actuation motion to the central platform and minimize the parasitic motion. The unique integration of four DSLAs and one 4P-PCM make the proposed MCLNS possess compact structure and stable performance. The characterization of the MCLNS is formulated by a specially established analytical model and validated by finite-element analysis simulation and experimental tests. Experimental studies show that the workspace of the MCLNS prototype is large than 0.87 × 0.87 mm2 and the positioning resolution of the MCLNS prototype is better than 9 nm. By means of a nonlinear forward proportional integral derivative control strategy, the maximum contouring error of the MCLNS is maintained within 2.7% while tracking a 1257 μm s−1 circular trajectory.

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Development of an Optimized Three-Axis Fast Tool Servo for Ultraprecision Cutting

Cited by 15 publications

References 28 publications

Development of a novel strategy based on in-process compensation of charge leakage for static force measurement by piezoelectric force sensors

Development of a novel strategy based on in-process compensation of charge leakage for static force measurement by piezoelectric force sensors

Ultraprecision tool-servo cutting of pure nickel for fabricating micro/nanostructure arrays

Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system

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