Effect of ultrasonic cavitation on sound pressure at the fundamental, second harmonic, and first ultraharmonic frequencies was investigated from low to high ultrasonic intensities. The driving frequencies were 22, 304, and 488 kHz. Sound pressure was measured using a needle-type hydrophone and ultrasonic cavitation was estimated from the broadband integrated pressure (BIP). With increasing square root of electric power applied to a transducer, the sound pressure at the fundamental frequency linearly increased initially, dropped at approximately the electric power of cavitation inception, and afterward increased again. The sound pressure at the second harmonic frequency was detected just below the electric power of cavitation inception. The first ultraharmonic component appeared at around the electric power of cavitation inception at 304 and 488 kHz. However, at 22 kHz, the first ultraharmonic component appeared at a higher electric power than that of cavitation inception.