Development of Carbon Nanotube-Based Sensors—A Review

Abstract-The mechanical properties of carbon nanotubes have been widely employed to enhance the performance of atomic force microscopy (AFM) cantilever tips. Utilizing the electromechanical properties of carbon nanotubes, this paper investigates the potential of using carbon nanotubes as active strain sensing elements on AFM cantilevers. A batch microfabrication process was developed to construct silicon microcantilevers. Multiwalled carbon nanotubes were dielectrophoretically assembled between electrodes. Based on the characterization results of 12 devices, the CNT-based cantilevers demonstrated a linear relationship between resistance changes and externally applied strain. The gauge factor ranged from 78.84 to 134.40 for four different device configurations.Index Terms-Atomic force microscopy, cantilevers, carbon nanotubes, MEMS/NEMS (micro/nanoelectromechanical systems).

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“…A detailed discussion on the topic of CNT integration can be found in [15]. A few of the integration techniques are briefly described as follows.…”

Section: Electrode Contact Integration Of Cntsmentioning

confidence: 99%

Toward Carbon Nanotube-Based AFM Cantilevers

Tong

Sun

2007

IEEE Trans. Nanotechnology

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“…These methods are divided in two groups: (i) direct 1D carbon nanostructure growth and integration (also called in situ growth techniques), which is characterized by the control of the position of the nanostructures on the substrate, and (ii) 1D carbon nanostructure assembly and integration (also called postgrowth manipulation), which is characterized by moving the previously synthesized nanostructures to the desired position. (8,86) Prototypes of 1D carbon sensors have been developed on the basis of different transduction principles and with different device architectures. In this review, our focus is on NEMS-based sensors using suspended structures made from CNT (or CNF or CNW).…”

Section: Applications Of 1d Carbon Nanostructures As Sensing Elementsmentioning

confidence: 99%

One-Dimensional Carbon Nanostructures—From Synthesis to Nano-electromechanical Systems Sensing Applications—

2017

Sensors and Materials

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The fundamental properties of one-dimensional (1D) carbon nanostructures and their promising technological applications have stimulated significant research in different areas. Because of their outstanding electrical and mechanical properties, these nanostructures have emerged as a new class of sensor material with real potential for a variety of nano-electromechanical systems (NEMS). Several studies have shown that the performance of a NEMS device is significantly affected by the material properties of the nanostructures used to build it. For this reason, a section of this review is devoted to the synthesis and properties of 1D carbon nanostructures including nanotubes, nanofibers, and nanowires. Thereafter, some NEMS-based sensors using 1D carbon nanostructures are introduced and issues related to their fabrication processes are addressed. The goal of this brief review is to outline the benefits of the use of 1D carbon nanostructures, the current status of development and challenges to enable their widespread application as sensing elements in NEMS devices.

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“…Mahar et al wrote a broad review of CNT sensors, summarizing many of the unique attributes of CNT materials and touching upon sensor applications ranging from temperature to strain (11). They also highlight research that showed changes in Raman spectroscopy data when single wall carbon nanotubes (SWNT) are immersed in various liquids, including common organics (12).…”

Section: Existing Reviewsmentioning

confidence: 99%

Application of Conductive Carbon Nanotube Fibers and Composites: Gas Sensor

Moloney¹,

Barrera²

2013

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Development of Carbon Nanotube-Based Sensors—A Review

Cited by 254 publications

References 86 publications

Toward Carbon Nanotube-Based AFM Cantilevers

Toward Carbon Nanotube-Based AFM Cantilevers

One-Dimensional Carbon Nanostructures—From Synthesis to Nano-electromechanical Systems Sensing Applications—

Application of Conductive Carbon Nanotube Fibers and Composites: Gas Sensor

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Development of Carbon Nanotube-Based Sensors—A Review

Cited by 254 publications

References 86 publications

Toward Carbon Nanotube-Based AFM Cantilevers

Toward Carbon Nanotube-Based AFM Cantilevers

One-Dimensional Carbon Nanostructures&mdash;From Synthesis to Nano-electromechanical Systems Sensing Applications&mdash;

Application of Conductive Carbon Nanotube Fibers and Composites: Gas Sensor

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One-Dimensional Carbon Nanostructures—From Synthesis to Nano-electromechanical Systems Sensing Applications—