“…From the previous discussion, it can be seen that 10 B has a higher probability of capturing thermal neutrons but produces lower secondary particle energy [35], so the 10 B-type SiC neutron detector has a smaller structure size parameter [9], [13], [32], [33], [37]. However, 6 LiF has a lower probability of capturing thermal neutrons but produces higher secondary particle energy [35], so the structure size parameter of 6 LiF type SiC neutron detectors is larger [9], [13], [32], [33], [37]. If 10 B is backfilled into a trench with a width of T B , and 6 LiF is backfilled into a trench with a width of T LiF , the properties of 10 B and 6 LiF to react with thermal neutrons can be fully utilized.…”