2000
DOI: 10.1088/0957-4484/11/3/309
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Development of contact scanning probe lithography methods for the fabrication of lateral nano-dimensional elements

Abstract: A method of contact scanning probe lithography has been developed to enable fabrication of elements with characteristic dimensions of about 50 nm. The method involves deposition of a thin-film two-layer polymer-metal mask coating, mechanical or thermal nonplastic deformation of the top metal layer with a probe microscope, the transfer of the pattern through the polymer by means of dry etching and the formation of various nanoelements through this prepared mask. The method is applicable to any materials relevan… Show more

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Cited by 7 publications
(2 citation statements)
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“…This has been demonstrated in schemes for thermomechanical writing that use a combination of heat and force to press a heated, sharp tip into a polymer surface, creating a plastic deformation. [2,6,9,10] The heated tip causes very local heating of the polymer material above its softening temperature, which effectively acts as the switch to turn on the writing process. [11] Although linear polymers exhibit such switching behavior above and below the glass-transition temperature (T g ), [6] they do not satisfy the other device requirements, especially stability to the repeated motion of surface scanning during imaging (e.g., reading).…”
Section: Introductionmentioning
confidence: 99%
“…This has been demonstrated in schemes for thermomechanical writing that use a combination of heat and force to press a heated, sharp tip into a polymer surface, creating a plastic deformation. [2,6,9,10] The heated tip causes very local heating of the polymer material above its softening temperature, which effectively acts as the switch to turn on the writing process. [11] Although linear polymers exhibit such switching behavior above and below the glass-transition temperature (T g ), [6] they do not satisfy the other device requirements, especially stability to the repeated motion of surface scanning during imaging (e.g., reading).…”
Section: Introductionmentioning
confidence: 99%
“…Tapering can enhance the potential of the optical fibers as sensors [5]. Probe taper angle is an important factor which determines the probe characteristics [6]. For applications in nano-optics, tapered optical fibers should exhibit short and robust taper region with a large opening angle at the apex [1].…”
Section: Introductionmentioning
confidence: 99%