“…Moment (or kinetic) equation analysis is another technique by which to derive the TOF parameters (Kitamori et al 1980, Kumar 1981, Skullerud and Kuhn 1983, Skullerud 1984, Penetrante et al 1985, Robson 1991. Numerically, TOF parameters were calculated using direct estimation of moment (Kitamori et al 1980), the path integral method (Skullerud 1984), multi-term approximation of the Boltzmann equation and Monte Carlo simulation (Penetrante et al 1985), the çight-time integral method (Ikuta and Murakami 1987, Ikuta et al 1988, Robson 1995, Kumar 1995, and so forth. On the basis of the TOF method and its modiåed model of arrival time spectra, which was proposed by Kondo and Tagashira (1990) and Date et al (1992) to follow a practical method of experimental measurements, Nakamura (1987Nakamura ( , 1988, Kurachi and Nakamura (1991), Hasegawa et al (1996) and Yoshida et al (1996) measured the electron drift velocities and the diãusion coeécients in N 2 , CO, CO 2 , SiH 4 /Kr, SF 6 and CH 4 .…”