2003 International Conference Physics and Control. Proceedings (Cat. No.03EX708) 2003
DOI: 10.1109/ssc.2003.1224169
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Development of fiber-optical microsensors for geophysical use

Abstract: Technologies related to the Micro ElectroMechanical Systems (MEMS) has been remarkably progressed in this decade, and various kinds of microsensors have been developed using the MEMS technologies. Microsensors have a potential to drastically improve the geophysical instrumentation, because they have advantages in size, weight, sensitivity, mobility, and cost to the conventional sensors. Researchers in Graduate School of Environmental Studies, Tohoku University, Sendai, Japan, have been developing microsensors … Show more

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