Development of flexible neural probes using SU-8/parylene

Xiang, Zhuolin; Wang, Hao; Zhang, Songsong; Yen, Shih-Cheng; Je, Minkyu; Tsang, W.M.; Xu, Yong-Ping; Thakor, Nitish V.; Kwong, Dim‐Lee; Lee, Chengkuo

doi:10.1109/nems.2013.6559908

Cited by 4 publications

(4 citation statements)

References 5 publications

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“…In addition, degradable and flexible microfluidic probes have been investigated for minimizing tissue damage when implanted. For instance, bio-dissolvable polymers such as poly(lactide-co-glycolide) (PLGA) [68] , silk [69] , or maltose [70] have been employed for temporally stiffening probes, which eventually will enable minimally invasive and targeted drug delivery to end organs.…”

Section: Technologies and Materials In Delivering And Monitoring Regenerative Therapeuticsmentioning

confidence: 99%

Minimally Invasive and Regenerative Therapeutics

et al. 2018

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Advances in biomaterial synthesis and fabrication, stem cell biology, bioimaging, microsurgery procedures, and microscale technologies have made minimally invasive therapeutics a viable tool in regenerative medicine. Therapeutics, herein defined as cells, biomaterials, biomolecules, and their combinations, can be delivered in a minimally invasive way to regenerate different tissues in the body, such as bone, cartilage, pancreas, cardiac, skeletal muscle, liver, skin, and neural tissues. Sophisticated methods of tracking, sensing, and stimulation of therapeutics in vivo using nanobiomaterials and soft bioelectronic devices provide great opportunities to further develop minimally invasive and regenerative therapeutics (MIRET). In general, minimally invasive delivery methods offer high yield with low risk of complications and reduced costs compared to conventional delivery methods. Here, we review minimally invasive approaches for delivering regenerative therapeutics into the body. The use of MIRET to treat different tissues and organs is described. Although some clinical trials have been done using MIRET, it is hoped that such therapeutics find wider applications to treat patients. Finally, we highlight some future perspective and challenges for this emerging field.

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Section: Technologies and Materials In Delivering And Monitoring Regenerative Therapeuticsmentioning

confidence: 99%

Minimally Invasive and Regenerative Therapeutics

et al. 2018

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“…This type of film failure can also occur during plasma etching when SU-8 is used as an etch mask; long etch times (i.e. prolonged wafer heating) can lead to delamination of SU-8 from the substrate layer [210]. Several techniques can prevent thermally induced stresses including the use of ramped softbakes [43,211,212], lowering the soft and post exposure bake temperatures [43,52], and adding a cooling or relaxation step following the post exposure bake [47,53].…”

Section: Surface and Bulk Modificationmentioning

confidence: 99%

“…In contrast, its structural stiffness and low water penetration compared to other polymers were the driving reasons for its selection as an enclosure material for implantable pressure sensors [211]. Mechanical and moisture barrier properties also led to the development of flexible neural probes with an integrated microfluidic channel for drug delivery using SU-8 as the structural and substrate material [210]. SU-8 has also been explored as a material to produce self-assembling capsules for drug delivery applications [216].…”

Section: Notable Applicationsmentioning

confidence: 99%

Review of polymer MEMS micromachining

Kim

Meng

2015

J. Micromech. Microeng.

130

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The development of polymer micromachining technologies that complement traditional silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) applications. Polymeric materials feature a diverse set of properties not present in traditional microfabrication materials. The investigation and development of these materials have opened the door to alternative and potentially more cost effective manufacturing options to produce highly flexible structures and substrates with tailorable bulk and surface properties. As a broad review of the progress of polymers within MEMS, major and recent developments in polymer micromachining are presented here, including deposition, removal, and release techniques for three widely used MEMS polymer materials, namely SU-8, polyimide, and Parylene C. The application of these techniques to create devices having flexible substrates and novel polymer structural elements for biomedical MEMS (bioMEMS) is also reviewed.

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“…Removable rigid insertion shuttles have been used to strength soft polymer probes during implant ation [18][19][20][21]. In addition, polymer probes have been coated or injected with dissolvable or degradable materials such as polyethylene glycol (PEG), maltose and sucrose gel [8,[22][23][24][25][26][27][28]. Moreover, silk coating has proven to be a reliable strategy for probe insertion due to its good mechanical and biodegradable property [29,30].…”

Section: Introductionmentioning

confidence: 99%

Flexible deep brain neural probes based on a parylene tube structure

Zhao

Kim

Luo

et al. 2017

J. Micromech. Microeng.

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Most microfabricated neural probes have limited shank length, which prevents them from reaching many deep brain structures. This paper reports deep brain neural probes with ultra-long penetrating shanks based on a simple but novel parylene tube structure. The mechanical strength of the parylene tube shank is temporarily enhanced during implantation by inserting a metal wire. The metal wire can be removed after implantation, making the implanted probe very flexible and thus minimizing the stress caused by micromotions of brain tissues. Optogenetic stimulation and chemical delivery capabilities can be potentially integrated by taking advantage of the tube structure. Single-shank prototypes with a shank length of 18.2 mm have been developed. The microfabrication process comprises of deep reactive ion etching (DRIE) of silicon, parylene conformal coating/refilling, and XeF2 isotropic silicon etching. In addition to bench-top insertion characterization, the functionality of developed probes has been preliminarily demonstrated by implanting into the amygdala of a rat and recording neural signals.

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Development of flexible neural probes using SU-8/parylene

Cited by 4 publications

References 5 publications

Minimally Invasive and Regenerative Therapeutics

Minimally Invasive and Regenerative Therapeutics

Review of polymer MEMS micromachining

Flexible deep brain neural probes based on a parylene tube structure

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