2017
DOI: 10.1063/1.4974601
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Development of high temperature capable piezoelectric sensors

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Cited by 3 publications
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“…The piezoelectric coefficients of AlN are evaluated to be on the order of d 33 = 5.6 pC N −1 and d 14 = 9.7 pC N −1 . [25][26][27][28][29][30][31] An AlN ultrasound-guided wave sensor was fabricated using the d 31 mode and demonstrated to have the sensing capability at a high temperature of 800 °C. But the transmitting sensitivity of AlN sensors was relatively low.…”
Section: Introductionmentioning
confidence: 99%
“…The piezoelectric coefficients of AlN are evaluated to be on the order of d 33 = 5.6 pC N −1 and d 14 = 9.7 pC N −1 . [25][26][27][28][29][30][31] An AlN ultrasound-guided wave sensor was fabricated using the d 31 mode and demonstrated to have the sensing capability at a high temperature of 800 °C. But the transmitting sensitivity of AlN sensors was relatively low.…”
Section: Introductionmentioning
confidence: 99%