2023
DOI: 10.1021/jasms.2c00371
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Development of High Throughput Microscope Mode Secondary Ion Mass Spectrometry Imaging

Felicia M. Green,
Maria Elena Castellani,
Yifeng Jia
et al.

Abstract: This paper describes the development and initial results from a secondary ion mass spectrometer coupled with microscope mode detection. Stigmatic ion microscope imaging enables us to decouple the primary ion (PI) beam focus from spatial resolution and is a promising route to attaining higher throughput for mass spectrometry imaging (MSI). Using a commercial C60 + PI beam source, we can defocus the PI beam to give uniform intensity across a 2.5 mm2 area. By coupling the beam with a position-sensitive spatial de… Show more

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