Development of high-voltage photovoltaic micro-devices for an energy supply to micromachines

Sakakibara, T.; Izu, H.; Kura, Tatsuya; Shinohara, Wataru; Iwata, Hiroshi; Kiyama, Seiichi

doi:10.1109/ismmhs.1994.512901

Cited by 11 publications

(7 citation statements)

References 2 publications

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“…From the experimental data, the Young's moduli of individual layers can be identified using (11): E 1 = 0.571 GPa, E 2 = 0.73 GPa, E 3 = 1.96 GPa. These values are within the ranges reported in the literature [21,22].…”

Section: Impact Of the Stiffening Effect And Design Of The Insulator supporting

confidence: 90%

Integrated sensing for ionic polymer–metal composite actuators using PVDF thin films

Chen¹,

Shen²,

Xi³

et al. 2007

Smart Mater. Struct.

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Compact sensing methods are desirable for ionic polymer-metal composite (IPMC) actuators in microrobotic and biomedical applications. In this paper a novel sensing scheme for IPMC actuators is proposed by bonding an IPMC and a PVDF (polyvinylidene fluoride) thin film with an insulating layer in between. The insulating layer thickness is properly designed to minimize the stiffness of the composite IPMC/PVDF structure while reducing the electrical feedthrough coupling between the IPMC and PVDF. A distributed circuit model is developed to effectively represent the electrical coupling dynamics, which is then used in real-time compensation for extraction of the true sensing signal. Experimental results show that the developed IPMC/PVDF structure, together with the compensation algorithm, can perform effective, simultaneous actuation and sensing. As the first application, this sensori-actuator has been successfully used for performing and monitoring open-loop micro-injection of living Drosophila embryos.

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Section: Impact Of the Stiffening Effect And Design Of The Insulator supporting

confidence: 90%

Integrated sensing for ionic polymer–metal composite actuators using PVDF thin films

Chen¹,

Shen²,

Xi³

et al. 2007

Smart Mater. Struct.

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“…Vinogradov and Holloway (1999) have reported values of the Poisson ratio of PVDF fluoropolymer in the range 0.33-0.35. Various values for the Young's modulus of PVDF fluoropolymer are available: Thongsanitgarn et al (2010) reported a value of 1.52 GPa; Vinogradov and Holloway (1999) reported a value of 1.87 GPa; Linares and Acosta (1997) reported a value of 2 GPa; and Sakakibara et al (1994) reported values between 2.5 GPa and 2.7 GPa. An Instron 5566 Universal Testing Machine was used to independently measure the Young's modulus of the fishing line used in our experiments.…”

Section: Eperimental Proceduresmentioning

confidence: 99%

Theoretical and experimental study of the stability of a soap film spanning a flexible loop

Biria

Fried

2015

International Journal of Engineering Science

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a b s t r a c tA variational approach is used to study the stability of a soap film spanning a flexible loop. The film is modeled as a fluid surface endowed with constant tension and the loop is modeled as an inextensible and unshearable elastic rod that resists not only bending but also twisting about the tangent to its centerline. The first and second variations of the underlying energy functional are derived, leading to governing equilibrium equations and energetically based stability conditions. The latter conditions are applied to explore the effect of subjecting flat circular configurations to planar and transverse perturbations. Both the areal stretching and the lineal twisting prove to compete against the lineal bending to destabilize such a configuration. Experiments are performed to study post-buckled configurations and to assess the validity of the theoretical predictions.

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“…10,11) This markedly degrades the sensitivity of the micro-resonator via the Q-factor. Besides, PZT films exhibit a much lower Young's modulus E (E PZT ¼ 63 GPa 12) ) than single-crystal silicon (E si(100) ¼ 179 GPa 13) ), but a higher density ( PZT ¼ 7500 kg/m 3 , 12) si ¼ 2330 kg/m 314) ). The high results in a large m 0 , and the low E degrades the Q-factor of the resonator by the air damping effect.…”

Section: Introductionmentioning

confidence: 99%

High Quality Factor Silicon Cantilever Transduced by Piezoelectric Lead Zirconate Titanate Film for Mass Sensing Applications

Ikehara

Zhang

et al. 2007

jjap

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In this paper, we present a single-crystal silicon cantilever integrated with piezoelectric lead zirconate titanate (PZT) film as both an actuator and a sensor for resonant-based mass sensing applications. The pattern size of the PZT film was restricted to the fixed end of the cantilever to suppress intrinsic energy loss from the PZT film and multi layered structure. The energy dissipation mechanism of the cantilever was discussed. The mechanical quality factor (Q-factor) and sensitivity dependence on the cantilever's geometry were investigated. It was found that the Q-factor and sensitivity of the cantilever can be markedly improved by partially covering the cantilever with the PZT film. Under atmospheric pressure, excellent Q-factor of 808 was achieved by a 30-mm-wide 100-mm-long cantilever at fundamental resonant mode. Under reduced pressure, the proposed cantilever exhibits Q-factor several times greater than that of our previous reported fully PZT-covered cantilever. Moreover, high-mode vibration was successfully demonstrated using the proposed structure for the pursuit of higher mass-detection sensitivity.

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Development of high-voltage photovoltaic micro-devices for an energy supply to micromachines

Cited by 11 publications

References 2 publications

Integrated sensing for ionic polymer–metal composite actuators using PVDF thin films

Integrated sensing for ionic polymer–metal composite actuators using PVDF thin films

Theoretical and experimental study of the stability of a soap film spanning a flexible loop

High Quality Factor Silicon Cantilever Transduced by Piezoelectric Lead Zirconate Titanate Film for Mass Sensing Applications

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