2001
DOI: 10.1002/1521-4109(200107)13:11<911::aid-elan911>3.0.co;2-0
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Development of Metal-Based Microelectrode Sensor Platforms by Chemical Vapor Deposition

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Cited by 15 publications
(9 citation statements)
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“…The most common fabrication procedure of inlaid microdisk electrodes involves encapsulating carbon fibers or metal wires in glass capillaries and then polishing the tips to expose the microdisk surfaces. , Other methods have also been employed to produce an insulating sheath around the electrode material and include dip-coating metallic wires or carbon fibers with insulating polymers, ,, deposition of silica thin films, , and electrophoretic deposition of paint. With the latter construction methods, insulating shields with thickness (b − a) comparable to the electrode radius a are usually produced (Figure A). The current interest for such kinds of electrodes, other than for small-volume and microenvironment applications, , is largely driven by the use of microelectrodes as tips in scanning electrochemical microscopy (SECM). , In this technique, the parameter b/a , usually defined as RG, has strong influence on the Faradaic tip current, especially when the tip is moved in the vicinity of an inert substrate. ,
1 Schematic representation of (A) electrode dimensions and simulation domain and (B) diffusion at a TSMs.
…”
mentioning
confidence: 99%
“…The most common fabrication procedure of inlaid microdisk electrodes involves encapsulating carbon fibers or metal wires in glass capillaries and then polishing the tips to expose the microdisk surfaces. , Other methods have also been employed to produce an insulating sheath around the electrode material and include dip-coating metallic wires or carbon fibers with insulating polymers, ,, deposition of silica thin films, , and electrophoretic deposition of paint. With the latter construction methods, insulating shields with thickness (b − a) comparable to the electrode radius a are usually produced (Figure A). The current interest for such kinds of electrodes, other than for small-volume and microenvironment applications, , is largely driven by the use of microelectrodes as tips in scanning electrochemical microscopy (SECM). , In this technique, the parameter b/a , usually defined as RG, has strong influence on the Faradaic tip current, especially when the tip is moved in the vicinity of an inert substrate. ,
1 Schematic representation of (A) electrode dimensions and simulation domain and (B) diffusion at a TSMs.
…”
mentioning
confidence: 99%
“…The thin gate dielectric HfO 2 layer can be positioned on the top region using the atomic layer deposition (ALD) method [32]. In the next stage, utilizing the chemical vapor deposition process (CVD) [33], the metal electrodes (source, gate, and drain) have been developed on all sides of the active area. In the final stage, the metal electrode layer on the source side can be etched using a wet etching technique to create nanocavity.…”
Section: Biosensor Structure and Fabrication Processmentioning
confidence: 99%
“…Microeletrodos de disco podem também ser fabricados pela técnica de deposição química em fase vapor, [35][36][37][38][39][40][41] processo no qual a microfibra é isolada com uma fina camada de sílica. A formação do filme ocorre pela deposição da sílica a partir dos seus precursores gasosos (SiCl 4 , H 2 e O 2 ) ou pela deposição seqüencial de Si(OEt) 4 e dos precursores gasosos.…”
Section: Microeletrodos De Disco Fabricados a Partir Da Deposição Quíunclassified