2023 7th IEEE Electron Devices Technology &Amp; Manufacturing Conference (EDTM) 2023
DOI: 10.1109/edtm55494.2023.10102929
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Development of MFMIS Gatestack with Thick Hafnium Zirconium Oxide (HZO) for Nonvolatile Memory Application

Bohyeon Kang
1
,
Jongseo Park
2
,
Junghyeon Hwang
3
et al.
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